Study on the Method of High Accuracy Flatness Measurement

Zhi Zhang
2000-01-01
Abstract:The flatness measurement method of 000 level plate using straightness measuring parts of two mode laser measurement system is described in this paper. It analyzes and calculates the measurement uncertainty of the method and does some experiments. The results of the theoretical analyses and experiments indicate that the measurement uncertainty and repeatability can satisfy the measurement demand of 000 level plate.
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