Abstract:In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated. In a MDOF grating interferometry system, there are four diffraction beams from a two-axis scale grating and reference grating, respectively. For further modulation, these beams will propagate more than 100 mm, which makes paralleling these beams necessary. In previous research, collimation lens, separate prisms and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate have been demonstrated. However, large power loss and assembly complicity makes these techniques less competitive. For solving this problem, this research proposed a new lens module, which is an improved type prism, quadrangular frustum pyramid (QFP) prism. The prism is designed in such a way that these four reflected beams from the grating are symmetrically incident into the prism through the upper surface, total reflected on the inner sides of the prism, and then parallel getting through the bottom surface. A prism that allows an incident beam diameter of 1 mm and four paralleling beams with a 10 mm distance between the two diffraction beams along one direction was designed, fabricated and tested. Testing results based on an entire grating interferometry system verified that the proposal in this research is greatly effective in beam paralleling in terms of less power loss and high paralleling and greatly reduces the assembly complicity, which will eventually be beneficial for grating interferometry application.

Improving the Optical Subdivision Ability of a Grating Interferometer Via Double-Row Reverse Blazed Gratings

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Grating Interferometry with High Optical Subdivision

Binary Approximate Structure of Blazed Grating

Diffraction Properties of Transmission Binary Blazed Grating

Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

Two-dimensional Grating Interferometer with Nanometer Accuracy

High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on Its Alignment Tolerance

Optimization and Fabrication of Chromium Grating in Self-Traceable Interferometer

Design of blazed grating used for frequency division and study on its diffraction action

Design and fabrication of soft x-ray blazed diffraction gratings

Displacement Measuring Grating Interferometer: a Review

A Displacement Measuring System Based on Grating Double Diffraction

Study on the Fabrication of Blazed Grating with Sub-Micrometer Space on Aluminum Film

Experimental Study About A Type of Gratings Interferometer

Design of Double-Period Graded Photonic Structure by Multi-Fiber Interferometer

Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

Linear Response, Multi-Order Grating Interferometry Using a Reversal Shearing Imaging System.