Abstract:Gratings are key components in many optical systems such as spectrometers. Improving their dispersion is very important for their applications, but improving the single-order diffraction efficiency of an ultrahigh dispersion grating is still very challenging. Here, we propose an analytical approach for the design of a new type of grating named hybrid grating, which consists of a subwavelength grating and a non-subwavelength grating. The proposed analytical approach is based on a physical model in which the non-subwavelength grating acts as an ultrathin reflection grating and the subwavelength grating acts as an antireflection coating. Using the rigorous coupled-wave analysis and the finite-difference time-domain method, we numerically demonstrate that multiple hybrid gratings designed at different wavelengths using the proposed analytical approach show a diffraction efficiency of greater than 95 % in the -1st diffraction order for TE-polarized light, an angular dispersion of greater than 0.8 mrad/nm and a deflection angle of greater than 80 degrees. Furthermore, we numerically demonstrate that by using a combined approach to optimize the parameters of a hybrid grating, the diffraction efficiency in the -1st diffraction order for TE-polarized light can be increased to more than 97 % under the condition that the angular dispersion and the deflection angle of the hybrid grating remain unchanged. Our work provides an avenue for rapid design of gratings with high angular dispersion, large deflection angle and high diffraction efficiency.

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Fabrication of Ultraviolet Transmission Blazed Grating for Slitless Spectrometer

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Soft X-ray freestanding blazed transmission gratings