Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration

Wenyuan Zhou,Wenhao Li,Lin Liu,Yujia Sun,Shan Jiang,Weichen Wang,Guoxue Chen,Zhaowu Liu
DOI: https://doi.org/10.1016/j.optcom.2024.130333
IF: 2.4
2024-01-26
Optics Communications
Abstract:Traditional grating interferometer with Littrow configuration suffer from low optical subdivision factor and high grating base surface shape error. To solve these problems, a grating interferometer with bidirectional Littrow configuration is proposed. Using a high linear density grating of 1800 gr/mm with quadruple optical subdivision is achieved on the optical path. A three-dimensional contour analysis method is proposed to calculate the influence of surface shape error. The experimental result shows that the error of the 10 mm/2 mm displacement test in the X/Z direction fluctuates in the range of ±25 nm, and the actual resolution in the X and Z direction is all 1.5 nm. In summary, the system has good repeatability and high resolution, and can achieve nanoscale displacement measurement in the X/Z direction, and has broad application prospects in the field of precision machining and manufacturing.
optics
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