Low polarization-sensitive ultra-broadband anti-reflection coatings with improved reliability
Yu-Ting Yang,Qing-Yuan Cai,Ding-Quan Liu,Ling-Shan Gao,Hao-Tian Zhang,Lei Peng,Er-Tao Hu,Bao-Jian Liu,Hai-Han Luo,Rong-Jun Zhang,Yu-Xiang Zheng,Yuting Yang,Dingquan Liu,Haotian Zhang,Baojian Liu,Yu Zheng
DOI: https://doi.org/10.1364/oe.495646
IF: 3.8
2023-06-30
Optics Express
Abstract:Broader spectra, lower reflectivity and higher reliability are the performance requirements for broadband antireflective (BBAR) films. In this work, a BBAR film structure was proposed, which maintains extremely low reflectivity, ultra-wide spectra, low polarization sensitivity and practical reliability. The BBAR film consists of a dense multilayer interference stack on the bottom and a nano-grass-like alumina (NGLA) layer with a gradient low refractive index distribution on the top. The film was deposited by atomic layer deposition, while the NGLA layer was formed by means of a hot water bath on Al 2 O 3 layer. The top NGLA layer has extremely high porosity and ultra-low refractive index, along with extremely fragile structure. To surmount the fragility of NGLA layer, a sub-nano layer of SiO 2 was grown by atomic layer deposition to solidify its structure and also to adjust the refractive index with different thicknesses of SiO 2 . Finally, in the wide wavelength range of 400-1100 nm, the average transmittance of the double-sided coated fused quartz reaches 99.2%. The absorption, light scattering, reliability and polarization characteristics of BBAR films were investigated. An optimized BBAR film with low polarization-sensitivity and improved reliability was realized, which should be potentially promising for application in optical systems.
optics