High-sensitivity Porous PDMS Sensor Based on Laser-Etched Pyramidal Structure

Xiaodong Zhang,Peng Pan,Jun Wei,Zhengchun Yang,Jun Liu,Peng Li,Guanying Liu,Haodong Shen,Peifeng Zeng
DOI: https://doi.org/10.1007/s10854-023-10535-2
2023-01-01
Journal of Materials Science Materials in Electronics
Abstract:In this paper, a flexible resistive pressure sensor of polydimethylsiloxane (PDMS) with porous pyramidal array structure is proposed to be prepared rapidly by laser etching. The porous doped PDMS was prepared by laser etching technique and continuous heat treatment to overcome the viscosity requirement of porous silica by traditional template method, reduce the preparation cost, and improve the practicality. Using the carbon-based filler material with high light absorption coefficient and low interfacial thermal resistance, the light absorption coefficient of MWCNTs has a significant role in laser etching, which has a significant effect on the depth of cut of the laser. In addition, the strain response of the porous PDMS sponge media layer under different external forces was simulated using finite element analysis (FEA). Its sensitivity is as high as 645 kPa−1, with fast response of 26 ms and 32 ms, good hysteresis (0.78
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