Influence of the Microstructure of Sputtered Ti Films on the Anodization Toward TiO2 Nanotube Arrays

Peng Li,Shuxin Dai,Dan Dai,Zhiming Zou,Renda Wang,Ping Zhu,Kun Liang,Fangfang Ge,Feng Huang
DOI: https://doi.org/10.1016/j.cplett.2023.140675
IF: 2.719
2023-01-01
Chemical Physics Letters
Abstract:The microstructure of sputtered Ti films plays a crucial role in the formation of TiO2 nanotube arrays (TNTs) via anodization. Magnetron sputtering under controllable parameters was used to create diverse microstructures of Ti films, followed by anodization in an ethylene glycol-based electrolyte. The relationship between the micro-structures of Ti films and the resulting TiO2 layers was analyzed, and the film density was identified as the key microstructure affecting the TNTs formation. The electron aggregation theory explained why denser Ti films facilitate TNTs formation, and confirmatory experiments were performed to validate this theory..
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