Multiple Parameter Decoupling Using a Single Resonant MEMS Sensor Via Blue Sideband Excitation

Jingqian Xi,Lei Xu,Yuan Wang,Fangjing Hu,Chengxin Li,Linlin Wang,Huafeng Liu,Chen Wang,Michael Kraft,Chun Zhao

DOI: https://doi.org/10.1109/mems49605.2023.10052550

2023-01-01

Abstract:This work for the first time reports a simultaneous multiple parameter decoupling (MPD) technique using a single resonant MEMS sensor on the basis of a novel closed-loop blue-sideband excitation (BSE) scheme. Owing to the BSE, multiple vibration modes of the resonant MEMS sensor can be excited at the same time, enabling the implementation of the MPD algorithm. Experimental validation is conducted with a clamped-clamped beam resonator that concurrently undergoes temperature changes and either steady-state or periodic electrostatic perturbations. As a result, the output signals of the sensor that comprise both ambient temperature changes and the electrostatic perturbations can be separated in a single operation, with a cross-coupling suppression of up to 31 dB. In addition, the decoupled parameters are consistent with the stand-alone measurements, affirming the functionality of the MPD. The proposed technique is of great potential for practical applications such as suppressing temperature fluctuations in high-precision resonant sensors and multiple-parameter monitoring.