Lattice-Asymmetry-Driven Selective Area Sublimation: A Promising Strategy for III-Nitride Nanostructure Tailoring

Shanshan Sheng,Duo Li,Ping Wang,Tao Wang,Fang Liu,Zhaoying Chen,Renchun Tao,Weikun Ge,Bo Shen,Xinqiang Wang
DOI: https://doi.org/10.1002/pssr.202200399
2023-01-01
Abstract:Lattice-asymmetry-driven selective area sublimation (SAS) process of GaN is systemically investigated by exploring the in situ dynamic evolution of the decomposition pathway under ultra-high vacuum. The rationale of the SAS is confirmed as a strong anisotropic decomposition driven by lattice-asymmetry of wurtzite crystal: the sublimation preferably starts along the -c axis due to the relatively lower decomposition energy barrier. Finally, the fabrication of site- and size-controlled GaN nanowires has been achieved by utilizing the SAS process, exhibiting good controllability on the sidewall of nanowires. These findings shed light on the thermodynamic mechanism of the lattice-asymmetry-driven sublimation process in III-nitrides, providing an efficient alternative approach for the tailoring of semiconductor micro/nanostructures.
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