Abstract:Double microlens arrays (MLAs) in series can be used to divide and superpose laser beam so as to achieve a homogenized spot. However, for laser beam homogenization with high coherence, the periodic lattice distribution in the homogenized spot will be generated due to the periodicity of the traditional MLA, which greatly reduces the uniformity of the homogenized spot. To solve this problem, a monolithic and highly integrated double-sided random microlens array (D-rMLA) is proposed for the purpose of achieving laser beam homogenization. The periodicity of the MLA is disturbed by the closely arranged microlens structures with random apertures. And the random speckle field is achieved to improve the uniformity of the homogenized spot by the superposition of the divided sub-beams. In addition, the double-sided exposure technique is proposed to prepare the rMLA on both sides of the same substrate with high precision alignment to form an integrated D-rMLA structure, which avoids the strict alignment problem in the installation process of traditional discrete MLAs. Then the laser beam homogenization experiments have been carried out by using the prepared D-rMLA structure. The laser beam homogenized spots of different wavelengths have been tested, including the wavelengths of 650 nm (R), 532 nm (G), and 405 nm (B). The experimental results show that the uniformity of the RGB homogenized spots is about 91%, 89%, and 90%. And the energy utilization rate is about 89%, 87%, 86%, respectively. Hence, the prepared structure has high laser beam homogenization ability and energy utilization rate, which is suitable for wide wavelength regime.

Random spherical microlens array fabricated by elliptical vibration diamond cutting and molding.

Random Silica-Glass Microlens Arrays Based on the Molding Technology of Photocurable Nanocomposites.

Close Packed Random Rectangular Microlens Array Used for Laser Beam Homogenization

Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency.

Fabrication of High-Quality Microlens Arrays on Fused Silica Based on Combined Rapid Evaporative Ablation and Precision Melting Polishing of CO2 Lasers

Fabrication of high aspect-ratio aspheric microlens array based on local spiral diamond milling

Integrated Double-Sided Random Microlens Array Used for Laser Beam Homogenization

Preparation of Sol-Gel Random Micro Lens Array

High-Performance Laser Beam Homogenizer Based on Double-Sided Concave Microlens

Fabrication of Diamond Microlens Arrays for Monolithic Imaging Homogenizer

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.

Fabrication of a double-sided micro-lens array by a glass molding technique

Rapid Fabrication of A Large-Area Close-Packed Quasi-Periodic Microlens Array on Bk7 Glass

Soft Mold of Microlens Arrays Fabricated by Surface Self-Assembly

Mold-Free Self-Assembled Scalable Microlens Arrays with Ultrasmooth Surface and Record-high Resolution

Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse

A Facile Method to Fabricate Close-Packed Concave Microlens Array on Cylindrical Glass

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Microlens Arrays: Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes (adv. Mater. 23/2012)

Ultra-precision Manufacturing of Microlens Arrays Using an Optimum Machining Process Chain