1200 V 14 Mω SiC MOSFET with Low Specific On-Resistance of 3.3 Mω Cm2

Yuan-Lan Zhang,Wen-Hua Shi,Guang-Yin Lei,Qingchun Jon Zhang
DOI: https://doi.org/10.1109/sslchinaifws57942.2023.10071073
2022-01-01
Abstract:Benefitted from the high switching frequency, knee-free driving voltage, and a natural reverse recovery body diode, SiC MOSFETs are regarded as the most potential candidate to take place of Si IGBT in 600V-3300V power applications. Pursuing lower specific on-resistance (Rsp,on) at certain rated voltages is the critical aim for more advanced devices with smaller size and higher efficiency. Here, we represent a successful design and fabrication of 1200V/14mΩ 4H-SiC MOSFET with ultra-low specific on-resistances of 3.3 mΩ cm 2 at 25 ℃ and 6.4 mΩ cm 2 at 150 ℃, showing a desired positive resistance temperature coefficient. A detailed analysis has been made with respect to the static and dynamic characteristics, third quadrant conduction, and body diode, etc.
What problem does this paper attempt to address?