Design and Fabrication Optimization of Low-Crosstalk Silicon Arrayed Waveguide Gratings with 32 Channels and 100-Ghz Spacing

Changjian Xie,Xihua Zou,Fang Zou,Yong Zhang,Lianshan Yan,Wei Pan
DOI: https://doi.org/10.1016/j.optlastec.2023.109330
2022-01-01
Abstract:•Three types arrayed waveguides are designed and analyzed for seeking better multiplexing/de-multiplexing performances.•The causes of phase errors during fabrication are analyzed, and the morphology of the waveguide were optimized by improving the fabrication process.•Three types arrayed waveguide AWGs are fabricated by EBL. The one with rectangle-type arrayed waveguides is characterized with better multiplexing/de-multiplexing performance.•After several optimization rounds, the target rectangle-type AWGs are fabricated using 180-nm lithography for massive production. The achieved AWG have an outstanding performance, characterized by comprehensive specifications: lowest crosstalk of −20.4, highest channel uniformity of 0.95 dB, lowest insertion loss of 4.5 dB.
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