Study of Mechanism and Testing Method for Ph Sensing Using Open-Gate AlGaN/GaN High Electron Mobility Transistors

Chenyang Zhang,Peng Zhang,Xiaohua Ma,Jianzhang Shi
DOI: https://doi.org/10.1109/icfst.2017.8210481
2017-01-01
Abstract:Gallium nitride (GaN) is a promising semiconductor material with high electron mobility, larger sheet carrier concentration, and wide energy bandgap. Open-gate AlGaN/GaN high electron mobility transistors (HEMTs) are shown to be an effective method for detection polar liquids. In this work, the pH sensing response of an open-gate HEMT is investigated. The device exhibits a good linear pH detection performance. The pH response of the device is less sensitive at lower source-drain voltage where the transconductance of the device is small. But the high leakage current accelerate the polar liquid corrosion of the electrode surface metal at high source-drain voltage. This paper analyzes the reasonable calculation method to choice the suitable scan range of source-drain voltage.
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