The Au Electrode Optimized by the Wettability and Viscosity of Glass for LTCC Techonolgy

Tingnan Yan,Jianwei Zhao,Chao Dong,Xiaoxin Chen,Rong Sun,Dawei Wang
DOI: https://doi.org/10.1109/icept56209.2022.9873138
2022-01-01
Abstract:The reliability of LTCC modules will be increased by enhancing the wire bonding strength and conductivity of electrode. Au electrode performance has been optimized by the viscosity and wettability of different kinds of glass in this paper. Three kinds of glass were synthesized by melt quenching technique. Flow process of glass in Au electrode effect by glass high-temperature viscosity and wettability was studied. When the viscosity and wettability of glass was decreased, the optimized performance of electrode obtained with wire bonding strength was 10.2g and sheet resistivity was 2.5mΩ/sq.
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