Heteroepitaxy of Semiconducting 2H-Mote2 Thin Films on Arbitrary Surfaces for Large-Scale Heterogeneous Integration

Yu Pan,Roger Guzman,Siheng Li,Wanjin Xu,Yanping Li,Ning Tang,Huaxiang Yin,Jun He,Aimin Wu,Ji Chen,Wu Zhou,Xiaolong Xu,Yu Ye
DOI: https://doi.org/10.1038/s44160-022-00134-0
2022-01-01
Nature Synthesis
Abstract:The integration of two-dimensional semiconductors and arbitrary materials or architectures offers the possibility to enhance the functionality of a material and improve device performance. However, the traditional vertical epitaxy process requires a lattice-matched planar substrate, which limits the scope of heterogeneous integration. Bottom-up heteroepitaxial growth of single-crystal thin films on arbitrary materials with a large lattice mismatch typically results in highly defective interfaces. Here we report a general synthesis route for heteroepitaxial growth of semiconducting 2H-MoTe 2 films on arbitrary substrates with different crystal symmetries, lattice constants and three-dimensional architectures, which overcomes the limitation of the substrate. The in-plane two-dimensional epitaxy process through phase transition enables the direct synthesis of single-crystal semiconducting 2H-MoTe 2 films on arbitrary single-crystal substrates (including silicon, GaN, 4H-SiC, sapphire, SrTiO 3 and Gd 3 Ga 5 O 12 ) and three-dimensional architectures without the limitation of lattice matching and a planar surface. This heteroepitaxial method provides a way of heterogeneous integration of semiconducting 2H-MoTe 2 films with other functional materials or architectures for the fabrication of integrated devices.
What problem does this paper attempt to address?