Machine learning methods for prediction analyses of 4H-SiC microfabrication via femtosecond laser processing

Xinxin Li,Haipeng Wang,Bing Wang,Yingchun Guan
DOI: https://doi.org/10.1016/j.jmrt.2022.03.124
2022-01-01
Abstract:In this study, the effects of processing parameters on the geometry of femtosecond laser fabricated microgrooves on 4H-SiC wafer were investigated. To achieve a fast, accurate and intelligent manufacturing process, response surface methodology (RSM) and artificial neural network (ANN) method were applied for modeling and predicting the geometric features of microgrooves. In addition, analysis of variance (ANOVA) was employed to determine the most significant input variables on the responses. The RSM result showed that the third-order polynomial model equation was in high accordance with the experi-ments. During the analysis, laser power, scanning speed, and scanning times were set as input variables, and the depth, width and surface roughness (Ra) were set as response/ output variables. Finally, the predictive capabilities of the RSM and ANN models were compared with each other in terms of coefficient of determine (R-2), root mean squared error (RMSE), and relatively error (RE). The results indicated that the ANN method have a higher accuracy compared to those of the RSM model. (C)& nbsp;2022 The Author(s). Published by Elsevier B.V.& nbsp;& nbsp;
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