Investigation of Surface Damages in Contact and Form Measurement with a Force Sensor-Integrated Fast Tool Servo

Y. D. Cai,Y. L. Chen,S. Ito,Y. Shimizu,W. Gao
DOI: https://doi.org/10.1007/978-3-319-64943-6_37
2022-01-01
Abstract:This paper presents the investigation of surface damages of the workpiece during the process of tool positioning by using a force sensor-integrated fast servo (FS-FST) on a three-axis ultra-precision lathe. The cutting tool itself on the FS-FTS is employed as a force-controlled stylus probe to make contact with the workpiece surface and measure the forms of the fabricated micro-structures by servo controlling the tool displacement to keep a constant contact force. Experiments were carried out to demonstrate the surface damage degrees by varying the set contact force between the tool tip and the workpiece surface.
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