Abstract:Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and large imaging depth for biomedical applications. In this article, we report on the development of ceramic thin-film PZT-based dual- and multi-frequency piezoelectric micromachined ultrasonic transducer (pMUT) arrays and the demonstration of their PAI applications. With chips sized 3.5 mm in length or 10 mm in diameter, square and ring-shaped pMUT arrays incorporating as many as 2520 pMUT elements and multiple frequencies ranging from 1 MHz to 8 MHz were developed for endoscopic PAI applications. Thin ceramic PZT with a thickness of 9 μm was obtained by wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT arrays, whose piezoelectric constant d 31 was measured to be as high as 140 pm/V. Benefiting from this high piezoelectric constant, the fabricated pMUT arrays exhibited high electromechanical coupling coefficients and large vibration displacements. In addition to electrical, mechanical, and acoustic characterization, PAI experiments with pencil leads embedded into an agar phantom were conducted with the fabricated dual- and multi-frequency pMUT arrays. Photoacoustic signals were successfully detected by pMUT elements with different frequencies and used to reconstruct single and fused photoacoustic images, which clearly demonstrated the advantages of using dual- and multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

Imaging of Simulated Muscle Based on Single Chip of AlN Piezoelectric Micromachined Ultrasonic Transducer

Feasibility Study of Wearable Muscle Disorder Diagnosing Based on Piezoelectric Micromachined Ultrasonic Transducer

ULTRASONIC IMAGING OF MUSCLE-LIKE PHANTOMS USING BIMORPH PMUTS TOWARD WEARABLE MUSCLE DISORDER DIAGNOSTICS

Dual-Electrode Bimorph Pmut Arrays for Handheld Therapeutic Medical Devices

A Novel Method for Fabricating 2-D Array Piezoelectric Micromachined Ultrasonic Transducers for Medical Imaging

Photoacoustic Imaging Based on AlN MF-PMUT with Broadened Bandwidth

An Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer (Pmut) Array

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging

Ultrasonic Transducer Array Design For Medical Imaging Based On Mems Technologies

Piezoelectric Micromachined Ultrasonic Transducers for Ultrasound Imaging

A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

High-Density Pmut Array For 3-D Ultrasonic Imaging Based On Reverse-Bonding Structure

A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

An Ultra-High Element Density Pmut Array With Low Crosstalk For 3-D Medical Imaging

Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films

Large-Scale and High-Density Pmut Array Based on Isolated Sol-Gel Pzt Membranes for Fingerprint Imaging

Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers for high data-rate intrabody communication

Single-sided magnetic resonance-based sensor for point-of-care evaluation of muscle