Abstract:In this paper, a dual-harmonic-mode excited resonant pressure sensor with an AT-cut all-quartz sensing element was developed to synergistically achieve a wide measurement range for both temperature and pressure, along with a fast transient response. In this device, the excited third overtone mode indicated the applied pressure, while the beat frequency generated by the overtone and fundamental modes was used for self-temperature compensation. At the same time, the sandwiched all-quartz sensitive structure design effectively addressed the limitations associated with narrow pressure and temperature ranges. Especially, the dual-mode self-temperature sensing mechanism has been validated in the subzero temperature range for the first time. Quartz crystal processing techniques were employed to manufacture the sensor, and key performance metrics were characterized. The experimental results demonstrated that the sensor achieved an accuracy of ±0.015% full scale (FS) under a pressure range of 0 to 120MPa and a temperature range of −40 to 150 °C. The pressure sensitivity of the overtone frequency was quantified as 365Hz/MPa, and the beat frequency provided a temperature accuracy of 0.4 °C. Additionally, the developed sensor exhibited fast transient response under dynamic pressure and temperature conditions attributed to its self-temperature compensation capability. Thus, this study provides a practical solution for high-pressure measurements across a wide temperature range, combined with excellent transient performance.

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