Abstract:Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency (RF front-end, filters, timing, and frequency source) applications. The excellent stability, resolution, and accuracy of resonators lead them an ideal candidate for sensor implementation. The CMOS-MEMS technology allows for rapid, large-scale, and low-cost manufacturing. Thermal–piezoresistive resonators (TPRs) are promising candidates due to their favorable potential with scaling and robust performance in the ambient environment. A detailed finite element method (FEM) simulation flow is presented along with a mathematical model for device optimization. The devices were fabricated with the commercial CMOS technology utilizing the front-end-of-line (FEOL) polysilicon and back-end-of-line (BEOL) materials like silicon dioxide and interconnect metal. The flexibility of selective material placement in layout and complex routing using multi-metal interconnect is employed to develop a balanced TPR design at 2 MHz. A 5-MHz bulk mode TPR was designed for mass sensing application. The fabricated devices were characterized, and their performance is compared with other state-of-the-art works. Finally, the developed devices were used in real-world applications for mass sensing and pressure sensing. The device achieved 20 kHz/ng. The TPR devices combine principles of Pirani gauge and resonant sensors for improving the sensing range from 2 to 760 Torr (1 atm).

On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

A HIGH-RESOLUTION MASS SENSOR BASED ON TWO THERMAL PIEZORESISTIVE SELF-SUSTAINED RESONATORS COUPLED VIA AN ARCHING MEMBRANE

A Self-Sustained Mass Sensor with Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation

Self-Oscillating Calorimeter Based on Thermal-Piezoresistive Resonator

On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

Dual-Mode Thermal-Piezoresistive Coupled Resonators for Fast and Stable NIR Measurements with Differential Output

A micro resonant pressure sensor with adjustable quality factor

Thin Film PZT Multimode Resonant MEMS Temperature Sensor.

Single-Layer MoS2 Mechanical Resonant Piezo-Sensors with High Mass Sensitivity

CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection.

Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator

Piezoelectric Microelectromechanical Resonant Sensors for Chemical and Biological Detection

Piezoelectric Circuitry Tailoring for Resonant Mass Sensors Providing Ultra-High Impedance Sensitivity

THE EFFECT OF DC BIAS ON THE RESONANT FREQUENCY OF PZT MICRO-SENSOR

Medium Damping Influences On The Resonant Frequency And Quality Factor Of Piezoelectric Circular Microdiaphragm Sensors

Beating thermal noise in a dynamic signal measurement by a nanofabricated cavity optomechanical sensor