Dual-Mode Thermal-Piezoresistive Coupled Resonators for Fast and Stable NIR Measurements with Differential Output

Aojie Quan,Chen Wang,Hemin Zhang,Michael Kraft
DOI: https://doi.org/10.1109/led.2024.3443128
IF: 4.8157
2024-01-01
IEEE Electron Device Letters
Abstract:This study reports a resonant Near-Infrared (NIR) detector based on dual-mode, self-oscillating Thermal-Piezoresistive Coupled Resonators. The resented device alleviates the current trade-offs between resolution and response time in Microelectromechanical Systems (MEMS) thermal detectors. The thermal-piezoresistive coupled resonators operate simultaneously in the in-phase and out-of-phase modes and the frequency difference between two modes is selected as the output metric. The square-shaped coupling area of the coupled resonators acted as the NIR sensing region because of its low thermal resistance. Our design demonstrated a 700 μs response time,achieving 700-fold improvement compared to the conventional single-frequency output methods. Further, the differential output method inherently compensates for temperature drift, significantly increasing the immunity of device to thermal crosstalk by a factor of 25. A noise equivalent power density resolution of 253 pW/√Hz is achieved.
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