Resonant And Resistive Dual-Mode Uncooled Infrared Detectors Toward Expanded Dynamic Range And High Linearity

Xin Li,Ji Liang,Hongxiang Zhang,Xing Yang,Hao Zhang,Wei Pang,Menglun Zhang
DOI: https://doi.org/10.1063/1.4990285
IF: 4
2017-01-01
Applied Physics Letters
Abstract:This paper reports an uncooled infrared (IR) detector based on a micromachined piezoelectric resonator operating in resonant and resistive dual-modes. The two sensing modes achieved IR responsivities of 2.5 Hz/nW and 900 mu dB/nW, respectively. Compared with the single mode operation, the dual-mode measurement improves the limit of detection by two orders of magnitude and meanwhile maintains high linearity and responsivity in a higher IR intensity range. A combination of the two sensing modes compensates for its own shortcomings and provides a much larger dynamic range, and thus, a wider application field of the proposed detector is realized. Published by AIP Publishing.
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