Monolithic 3D $\mu$ -LED Displays Through BEOL Integration of Large-Area MoS 2 TFT Matrix

Xue Shen
DOI: https://doi.org/10.1109/iedm19574.2021.9720703
2021-01-01
Abstract:Using low-temperature back end of line (BEOL) process, we realize 3D monolithic ultra-high-resolution $\mu$-LED displays driven by large-area CVD MoS2 thin-film transistors (TFTs). The MoS2 transistors exhibit maximum and median mobility of 73 and 54 cm2 V−1s−1, drive current over 200 $\mu \mathrm{A}/\mu \mathrm{m}$, and excellent uniformity by systematic process innovation and optimization. Benefiting from high-performance TFT, the individual TFT-LED (1T-1D) cell delivers low operating voltage and high luminance of $7.1\times 10^{7}$ cd/m2, which satisfies various display applications to the high resolution and brightness limit. We further demonstrate prototypical $32\times 32$ active-matrix (AM) displays at 1270 PPI resolution.
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