Active matrix monolithic micro‐LED full‐color micro‐display

Xu Zhang,Longheng Qi,Cheung Chong,Peian Li,Chak Wah Tang,Kei May Lau,Wing Cheung Chong
DOI: https://doi.org/10.1002/jsid.962
2020-08-24
Journal of the Society for Information Display
Abstract:<p>An active matrix monolithic micro‐LED full‐color micro‐display with a pixel density of 317 ppi is demonstrated. Starting from large‐scale and low‐cost GaN‐on‐Si epilayers, monolithic 64 × 36 blue micro‐LED arrays are fabricated and further transformed to full‐color micro‐displays by applying a photo‐patternable color conversion layer. This full‐color fabrication scheme shows feasible manufacturability, suggesting a potential for volume production of micro‐LED full‐color micro‐display.</p>
engineering, electrical & electronic,materials science, multidisciplinary,optics,physics, applied
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