Nucleation of CoSi/sub 2/ and MnSi/sub 1.7/ in the Co/Mn/Si ternary system

Christophe Detavernier,R. L. Van Meirhaeghe,Xin-Ping Qu,Guo-Ping Ru,Shiyang Zhu,Bing-Zong Li
DOI: https://doi.org/10.1109/icsict.2001.981529
2001-01-01
Abstract:Silicide formation is studied for the ternary Co-Mn-Si system. At low temperatures, a mixed Co/sub 1-x/Mn/sub x/Si silicide is formed. It is found that the nucleation temperature of the Si-rich phases is increased by alloying: the nucleation temperature of CoSi/sub 2/ is increased by the presence of a small amount of Mn, while the nucleation temperature of MnSi/sub 1.7/ is increased in the presence of a small amount of Co. The nuclei could be observed using optical microscopy and atomic force microscopy. The influence of alloying on the nucleation of CoSi/sub 2/ and MnSi/sub 1.7/ is explained based on the effect of entropy of mixing.
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