Nucleation of CoSi2 and MnSi1.7 in the Co/Mn/Si ternary system

Detavernier, C.,Van Meirhaeghe, R.L.,Xin-Ping Qu,Guo-Ping Ru
DOI: https://doi.org/10.1109/ICSICT.2001.981529
2001-01-01
Abstract:Silicide formation is studied for the ternary Co-Mn-Si system. At low temperatures, a mixed Co1-xMnxSi silicide is formed. It is found that the nucleation temperature of the Si-rich phases is increased by alloying: the nucleation temperature of CoSi2 is increased by the presence of a small amount of Mn, while the nucleation temperature of MnSi1.7 is increased in the presence of a small amount of Co. The nuclei could be observed using optical microscopy and atomic force microscopy. The influence of alloying on the nucleation of CoSi2 and MnSi1.7 is explained based on the effect of entropy of mixing
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