Aluminum Nitride Electro-optic Modulator at Mid-IR Wavelengths

Shuai Liu,Ke Xu,Xiang Wen,Qinghai Song,Zhenzhou Cheng,Hon Ki Tsang

DOI: https://doi.org/10.1364/acpc.2015.asu2a.8

2015-01-01

Abstract:Mid-IR modulators based on AlN slot waveguides are proposed and designed. A maximum effective waveguide index change of 2×10-5 is obtained with a reasonable waveguide loss of ~ 2 dB/cm at 2.5 mm wavelength is achieved.