Abstract:In the rapidly evolving area of integrated photonics, there is a growing need for materials that satisfy the particular requirements of increasingly complex and specialized devices and applications. Present photonic material platforms have made significant progress over the past years; however, each platform still faces specific material and performance challenges. We introduce a novel material for integrated photonics: Aluminum Gallium Nitride (AlGaN) on Aluminum Nitride (AlN) as a platform for developing reconfigurable and nonlinear on-chip optical systems. AlGaN combines compatibility with standard semiconductor fabrication technologies, high electro-optic modulation capabilities, and large nonlinear coefficients while providing a broad and low-loss spectral transmission range, making it a viable material for advanced photonic applications. In this work, we design and grow AlGaN/AlN heterostructures and integrate fundamental photonic building blocks into these chips. In particular, we fabricate edge couplers, low-loss waveguides, directional couplers, and tunable high-quality factor ring resonators to enable nonlinear light-matter interaction and quantum functionality. The comprehensive platform we present in this work paves the way for nonlinear photon-pair generation applications, on-chip nonlinear quantum frequency conversion, and fast electro-optic modulation for switching and routing classical and quantum light fields.

Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits

High-efficiency fiber-to-chip interface for aluminum nitride quantum photonics

Aluminum nitride integration on silicon nitride photonic circuits: a new hybrid approach towards on-chip nonlinear optics

Photonic Integrated Circuits and Components Using Quantum Well Intermixing

Photonic-integrated circuits and components using quantum well intermixing

High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

Expanding the quantum photonic toolbox in AlGaAsOI

Photonic integrated circuits fabricated using quantum well intermixing

AlGaN/AlN heterostructures: an emerging platform for nonlinear integrated photonics

Hybrid Dielectric-Loaded Plasmonic Waveguide-Based Power Splitter and Ring Resonator: Compact Size and High Optical Performance for Nanophotonic Circuits

Aluminum nitride photonic integrated circuits: from piezo-optomechanics to nonlinear optics

Design and Characterization of Integrated Components for SiN Photonic Quantum Circuits.

Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits

Quantum Well Intermixing For The Realization Of Photonic Integrated Circuits

On-Chip Generation and Manipulation of Entangled Photons Based on Reconfigurable Lithium-Niobate Waveguide Circuits

Quantum Emitters with Narrow Band and High Debye-Waller Factor in Aluminum Nitride Written by Femtosecond Laser

High-Q aluminum nitride photonic crystal nanobeam cavities

Aluminum Nitride Thin Film Based Reconfigurable Integrated Photonic Devices

Bright high-purity quantum emitters in aluminium nitride integrated photonics

Aluminium Gallium Arsenide on Insulator for Integrated Quantum Photonics

On-chip non-reciprocal optical devices based on quantum inspired photonic lattices