Abstract:The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for wafer-level processing. The fabricated three-dimensional (3D) carbon structures have the advantages of excellent electrical and electrochemical properties, and superior biocompatibility. In order to improve their performance for applications in micro energy storage devices and microsensors, an increase in the footprint surface area is of great importance. Various approaches have been proposed for fabricating large surface area carbon-based structures, including the integration of nanostructures such as carbon nanotubes (CNTs), graphene, nanowires, nanofilms and nanowrinkles onto 3D structures, which has been proved to be effective and productive. Moreover, by etching the 3D photoresist microstructures through oxygen plasma or modifying the photoresist with specific materials which can be etched in the following pyrolysis process, micro/nano hierarchical carbon structures have been fabricated. These improved structures show excellent performance in various applications, especially in the fields of biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors and fuel cells. With the rapid development of microelectronic devices, the carbon-based MEMS/NEMS technique could make more aggressive moves into microelectronics, sensors, miniaturized power systems, etc. In this review, the recent advances in the fabrication of micro/nano hierarchical carbon-based structures are introduced and the technical challenges and future outlook of the carbon-based MEMS/NEMS techniques are also analyzed.

(Keynote) PowerMEMS Based on Semiconductor Technologies and Nano Materials

PowerMEMS based on semiconductor technologies and nano materials

Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution <i>via</i> IC-compatible <i>in situ</i> fabrication for on-chip energy storage

A Micro Dmfc Based On Silicon Micromachining Technology

Application of Mems Technology to Micro Direct Methanol Fuel Cell

Micro Supercapacitors for Energy Storage, On-Chip Devices Based on Prototyping of Patterned Nanoporous Carbon

An Air-Breathing Micro Direct Methanol Fuel Cell with 3D KOH-Etched Cathode Structure

Direct prototyping of 3D micro supercapacitors based on in-situ fabricated nanoporous carbon electrodes

Application of Nanoimprint Technology in MEMS-Based Micro Direct-Methanol Fuel Cell ( <formula formulatype="inline"><tex>$\mu$</tex></formula>-DMFC)

Development of MEMS-based direct methanol fuel cell with high power density using nanoimprint technology

Effects Of The Nanoimprint Pattern On The Performance Of A Mems-Based Micro Direct Methanol Fuel Cell

Nanoimprint of Proton Exchange Membrane for MEMS-based Fuel Cell Application

Recent Developments in Mems-Based Micro Fuel Cells

A Micro Direct Methanol Fuel Cell Using PDMS Assembly Technology

Fabrication of a novel micro-supercapacitor for MEMS and its performance analysis

On‐Chip Microsupercapacitors: from Material to Fabrication

A Monolithic Integrated Micro Direct Methanol Fuel Cell Based on Sulfo Functionalized Porous Silicon

Design, Fabrication and Testing of a Silicon-Based Air-Breathing Micro Direct Methanol Fuel Cell

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

Design, Optimization and Microfabrication of a Micro-Direct Methanol Fuel Cell with Microblocks in Anode Structure

Design Of Mems-Based Micro Direct Methanol Fuel Cell Stack