Abstract:Rapid synthesis of CVD graphene film of up to 900 cm2 for each batch of growth in a 1-inch furnace by a unique configuration assembly of Cu foil and a porous mediator.The large area of the high-quality graphene film exhibits a high crystallinity (ID/IG: 0.16) and high electrical conductivity (760 Ω/sq).The experimental study together with the multiphysical simulation indicates that the porous mediator enhances the gas diffusion and reaction kinetics and improves the crystallinity and growth rate of graphene.Improving the interdiffusion of reactive species results in homogeneous nucleation and equivalent kinetic growth.The yield rate for the synthesis of large-area and high-quality graphene, based on the chemical vapor deposition (CVD) method, is limited by the reactor size of a tubular furnace. Additionally, the reported methods to achieve a high-throughput process are still challenging. Currently, the rolled-up or vertically stacked configuration setup is applied to increase the loading growth. However, the reported methods limit the kinetic reaction of CVD growth and lead to the degradation of the uniformity and crystallinity of as-grown graphene.Here, we propose a novel method to produce a high-yield and uniform monolayer graphene film by helical stacking of Cu with highly porous carbon cloth as an efficient interdiffusion mediator. Additionally, computational fluid dynamics (CFD) is applied to simulate the dynamic distribution within the mediator.This method allows the rapid synthesis of graphene films of up to 900 cm2 for each batch of growth in a 1-inch furnace. Graphene with optimized conditions exhibits a high crystallinity (ID/IG: 0.16) and electrical conductivity (760 Ω/sq). The comprehensive study on recipe optimization together with the multiphysical simulation suggests that the proposed carbon cloth is an ideal spacing mediator for CVD graphene with a high Cu-loading density. This enhancement is attributed to the homogeneous interdiffusion of reactive gas/species in both the transverse and radial directions, resulting in homogeneous nucleation and equivalent kinetic growth. The capacity could reach 15.56 m2/hour in an 8-inch system. The CFD simulation indicates that the porous mediator can improve gas distribution and balance the pressure between the Cu foils to enhance high-yield graphene synthesis. This method provides an efficient strategy for the synthesis of high-throughput and large-area CVD graphene films, which is beneficial for cost-effective and versatile graphene-based applications.Download : Download high-res image (203KB)Download : Download full-size image

Scalable Growth of Vertically Oriented Graphene Nanosheets with High Rate by a High-Flux Mesoplasma Chemical Vapor Deposition

Efficient and Controllable Growth of Vertically Oriented Graphene Nanosheets by Mesoplasma Chemical Vapor Deposition

Plasma-enhanced Chemical Vapor Deposition Synthesis of Vertically Oriented Graphene Nanosheets

Advancements in Plasma-Enhanced Chemical Vapor Deposition for Producing Vertical Graphene Nanowalls

Vertically Standing Graphene: Heater‐Free and Substrate‐Independent Growth of Vertically Standing Graphene Using A High‐Flux Plasma‐Enhanced Chemical Vapor Deposition (Adv. Mater. Interfaces 18/2020)

Facile growth of vertically-aligned graphene nanosheets via thermal CVD: The experimental and theoretical investigations

Multi-linear Antenna Microwave Plasma Assisted Large-Area Growth of 6 × 6 In.2 Vertically Oriented Graphenes with High Growth Rate.

Highly Efficient Synthesis of Neat Graphene Nanoscrolls from Graphene Oxide by Well-Controlled Lyophilization

CVD Growth of Large Area Smooth-edged Graphene Nanomesh by Nanosphere Lithography

Fast Batch Production of High-Quality Graphene Films in a Sealed Thermal Molecular Movement System.

Insights into the Mechanism for Vertical Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition

Toward large-scale CVD graphene growth by enhancing reaction kinetics via an efficient interdiffusion mediator and mechanism study utilizing CFD simulations

Synthesis of Large-Scale Undoped and Nitrogen-Doped Amorphous Graphene on Mgo Substrate by Chemical Vapor Deposition

Autonomously Controlled Homogenous Growth of Wafer‐Sized High‐Quality Graphene Via a Smart Janus Substrate

Direct Growth of Large Area Uniform Double Layer Graphene Films on MgO(100) Substrates by Chemical Vapor Deposition

Directed Growth of Graphene Nanomesh in Purified Argon Via Chemical Vapor Deposition.

Oxide-assisted Growth of Scalable Single-Crystalline Graphene with Seamlessly Stitched Millimeter-Sized Domains on Commercial Copper Foils.

Synthesis Of Large-Area Single-Crystal Graphene

A route towards controlling the morphology of vertical graphene nanosheets

Low-Temperature and Rapid Growth of Large Single-Crystalline Graphene with Ethane

The Way Towards Ultrafast Growth of Single-Crystal Graphene on Copper