Multi-linear Antenna Microwave Plasma Assisted Large-Area Growth of 6 × 6 In.2 Vertically Oriented Graphenes with High Growth Rate.

Zheng Bo,Mengxiang Su,Huachao Yang,Shiling Yang,Jianhua Yan,Kefa Cen
DOI: https://doi.org/10.1063/1.5142756
IF: 1.6
2020-01-01
Review of Scientific Instruments
Abstract:Vertically oriented graphenes (VGs) are promising for many emerging energy and environmental applications, while their mass production still remains a critical challenge. This note reports a multi-linear antenna microwave plasma device for fabricating VGs on a large-scale. Eight coaxial linear plasma antennas are parallelly arrayed to produce large-area plasma, depositing 6 × 6 in.2 VGs on nickel foil at a high rate of 160 nm min-1. In supercapacitor applications, the potential of VGs for AC line filtering (an RC time of 0.43 ms) and decreasing the interfacial contact resistance within commercial activated carbon supercapacitors is demonstrated.
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