Controllable Fabrication of Vertical Graphene with Tunable Growth Nature by Remote Plasma-Enhanced Chemical Vapor Deposition

Tian-Tian Zhang,Bing-Hao Lv,Chen-Chen Fan,Bi-Yun Shi,Qiao-Jun Cao,Wei Wang,Fei-Fei Tao,Wei-Dong Dou
DOI: https://doi.org/10.1021/acsomega.3c04784
IF: 4.1
2023-10-10
ACS Omega
Abstract:As an important member of the graphene family, vertical graphene (VG) has broad applications like field emission, energy storage, and sensors owing to its fascinating physical and chemical properties. Among various fabrication methods for VG, plasma enhanced chemical vapor deposition (PECVD) is most employed because of the fast growth rate at relatively low temperature for the high-quality VG. However, to date, relations between growth manner of VG and growth parameters such as growth...
chemistry, multidisciplinary
What problem does this paper attempt to address?