Abstract:Laser interferometers and grating interferometers are typical optical measurement devices. The measurement resolution and range of the two devices are generally nanometers and meters, so they can meet the needs of high-resolution, largerange measurement. Whether it is a laser interferometer or a grating interferometer, it can be implemented based on a technical route based on the principle of homodyne interference or heterodyne interference. Heterodyne interference is not sensitive to changes in signal amplitude and DC offset, and can effectively avoid measurement errors. To design a highprecision displacement measuring device based on the principle of heterodyne interferometry, the key is whether it can accurately measure the phase change of the measured signal relative to the reference signal. The accuracy of the phase measurement determines the accuracy of the displacement measurement. Phase measurement methods can be divided into two categories: analog method and digital method. In this paper, a high-precision phase measurement system based on FPGA is designed based on the automatic digital phase detection method. The hardware part of the system includes FPGA, high-speed ADC module, signal conditioning circuit, the phase detection algorithm selects the automatic phase detection algorithm, and finally realizes the output display of the phase measurement results. The experimental results show that the deviation between the experimental data of all measurement points and the true value does not exceed 0.1°. Therefore, the accuracy of the phase measurement system designed in this paper is 0.2° and 0.018° resolution.

Direct Phase Extraction of Self-Mixing Displacement Measurement Using Hilbert Transform

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

300 GHz Vector Imaging System Based on Self-Mixing Detection

Sinusoidal phase-modulating self-mixing interferometer with nanometer resolution and improved measurement velocity range

Self-Mixing Interferometry Cooperating with Frequency Division Multiplexing for Multiple-Dimensional Displacement Measurement

Self-mixing Interferometry Based on Nanometer Fringes and Polarization Flipping

Displacement Sensing for Laser Self-Mixing Interferometry by Amplitude Modulation and Integral Reconstruction

Quadrature-Phase Detection of Laser SMI Based on Square-Wave Modulation for Displacement Measurement

Sinusoidal Phase-Modulating Laser Diode Interferometer for Wide Range Displacement Measurement

Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

Signal Processing Method of the Laser Heterodyne Interferometry Based on DSP

Displacement Calculation Method for Homodyne Interferometers Based on Spatial Phase Delay of Beams

High-accuracy Self-Mixing Interferometer Based on Single High-Order Orthogonally Polarized Feedback Effects

Optically Mutual-Injected Terahertz Quantum Cascade Lasers for Self-Mixing Velocity Measurements.

Self-Mixing Interferometry with Terahertz Quantum Cascade Lasers

Self-Mixing Interferometry with Mutual Independent Orthogonal Polarized Light

Real-Time Algorithm for Versatile Displacement Sensors Based on Self-Mixing Interferometry

Laser self-mixing interferometry for dynamic displacement sensing of multiple targets

Method and System for Phase Measurement of the Heterodyne Interference System