Quadrature-Phase Detection of Laser SMI Based on Square-Wave Modulation for Displacement Measurement

Hanqiao Chen,Fang Lin,Shize Ge,Desheng Zhu,Xinyu Kong,Zhipeng Dong,Wencai Huang
DOI: https://doi.org/10.1109/jsen.2023.3293856
IF: 4.3
2023-01-01
IEEE Sensors Journal
Abstract:We propose a new method called square-wave modulation quadrature separation (SWMQS) to reconstruct the displacement of the target in real time. A pair of quadrature laser self-mixing interference (SMI) signals are extracted synchronously from a square-wave modulation SMI signal generated by an electrooptic modulator (EOM) merely by a single photodetector (PD). Then, the reconstruction of displacement is realized by the quadrature-phase unwrapping process without estimation of direction or transition in a weak feedback regime. The rms error of 20.7 nm (0.52%) was achieved under the condition of a 13.1-dB signal-to-noise ratio (SNR) experimentally. Simulations and experiments show that this algorithm has strong antinoise ability and the reconstruction accuracy can be further improved as the feedback strength weakens. The algorithm allows us with low requirements on the target and simplifies the optical path structure and calculation process of orthogonal signal extraction with a simple calculation of average and interpolation.
engineering, electrical & electronic,instruments & instrumentation,physics, applied
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