Fragmentation of C60 Molecules in Partially Ionized Fullerene Beam Deposition

Zhong-Minren Ren,Xia-Xingxiong Xiong,Yuan-Chengdu Du,Zhi-Fengying Ying,Chen Liang-Yao,Li Fu-Ming
DOI: https://doi.org/10.1557/proc-359-429
1994-01-01
Abstract:C60 films have been deposited using a partially ionized cluster beam deposition (PIBD) technique. The experimental results show that as Va exceeds about 400 V almost all the C60 molecules fragmentate at collision with the substrate and the obtained films turn to be amorphous carbon layers at elevated Va indicated by measurements of Raman spectra, X-ray diffraction, and ellipsometry.
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