温度补偿型声表面波谐振器的非线性分析

GUAN Peng,SHI RuChuan,YANG Yang,HAN Tao
DOI: https://doi.org/10.1360/SSPMA-2021-0174
2022-01-01
Abstract:Research on the nonlinearity of temperature-compensated surface acoustic wave (TC-SAW) devices is paramount for the optimal design of high-performance radio frequency filters. In this study, geometric-, material-, and body-wave nonlinear factors were combined on the basis of the finite-amplitude wave nonlinear electroelastic theory. A high-order nonlinear partial differential wave equation and its weak form were derived, and a nonlinear finite element model was established to calculate accurate solutions of nonlinear responses of a TC-SAW resonator. Under different structural conditions, the simulation and measurement results agreed well. Using the second-order quantity of electric charge instead of the second-order harmonic response, the generation mechanism of a nonlinear body-wave mode was clarified. Considering the contribution of different nonlinear effects and different material constants to high-order harmonics, the calculation results showed that high-order harmonics were mainly affected by nonlinear elastic effects; the high-order material constants of SiO2's contribution was the most significant.
What problem does this paper attempt to address?