A Method for Biaxial Fracture Stress Test of Nanoscale Film

Fengyang Li,Leijian Cheng,Dacheng Zhang
DOI: https://doi.org/10.1109/transducers50396.2021.9495437
2021-01-01
Abstract:This paper proposes and verifies, for the first time as far as the authors know, a test method that can extract the biaxial stress when the nanoscale film is broken for exploring failure law of nanoscale materials. The biaxial fracture stress of 100nm thickness aluminum film was successfully characterized by this test method, proving the feasibility of the method. The degree of consistency between the fracture criterion of nanoscale aluminum film obtained by the test data and von-misses stress criterion is 89%, which verifies the accuracy of the method. After further processing of the test data, the fracture strengths of the nanoscale aluminum films deposited by different machines are 267MPa and 304MPa, respectively, indicating that the test method can also be used for process quality evaluation and monitoring.
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