Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

John T. Fourkas,Jinwei Gao,Zheng Han,Haitao Liu,Benedetta Marmiroli,Michael J. Naughton,John S. Petersen,Yong Sun,Alex Vagilio Pret,Yuebing Zheng

DOI: https://doi.org/10.3389/fnano.2021.700849

2021-01-01

Frontiers in Nanotechnology

Abstract:SPECIALTY GRAND CHALLENGE article Front. Nanotechnol., 07 October 2021 | https://doi.org/10.3389/fnano.2021.700849

What problem does this paper attempt to address?

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Xiaobin Xu,Qing Yang,Natcha Wattanatorn,Chuanzhen Zhao,Naihao Chiang,Steven J. Jonas,Paul S. Weiss

DOI: https://doi.org/10.1021/acsnano.7b05472

IF: 17.1

2017-01-01

ACS Nano

Abstract:While three-dimensional (3D) configurable hierarchical nanostructures have wide ranging applications in electronics, biology, and optics, finding scalable approaches remains a challenge. We report a robust and general strategy called multiple-patterning nanosphere lithography (MP-NSL) for the fabrication of periodic 3D hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of polymer nanospheres that serve as resists and that can be shaped in parallel for each processing step. The application of MP-NSL enables the fabrication of periodic, vertically aligned Si nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The MP-NSL method was utilized to construct 3D periodic hierarchical hybrid nanostructures such as multilevel solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic nanodisk/nanorings with tunable optical properties on a variety of substrates.
Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Ingo Ortlepp,Thomas Fröhlich,Roland Füßl,Johann Reger,Christoph Schäffel,Stefan Sinzinger,Steffen Strehle,René Theska,Lena Zentner,Jens-Peter Zöllner,Ivo W. Rangelow,Carsten Reinhardt,Tino Hausotte,Xinrui Cao,Oliver Dannberg,Florian Fern,David Fischer,Stephan Gorges,Martin Hofmann,Johannes Kirchner,Andreas Meister,Taras Sasiuk,Ralf Schienbein,Shraddha Supreeti,Laura Mohr-Weidenfeller,Christoph Weise,Christoph Reuter,Jaqueline Stauffenberg,Eberhard Manske

DOI: https://doi.org/10.1007/s41871-021-00110-w

2021-08-10

Nanomanufacturing and Metrology

Abstract:Abstract The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable: custom design and solutions for specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel patterning technologies. International society for optics and photonics. SPIE, Bellingham, 2021. 10.1117/12.2593229 ). For this reason, new aspects arise for future lithography, which is why enormous effort has been directed to the development of alternative fabrication technologies. Yet, the technologies emerging from this process, which are promising for coping with the current resolution and accuracy challenges, are only demonstrated as a proof-of-concept on a lab scale of several square micrometers. Such scale is not adequate for the requirements of modern lithography; therefore, there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional nanotechnologies. Similar challenges arise because of the technical progress in various other fields, realizing new and unique functionalities based on nanoscale effects, e.g., in nanophotonics, quantum computing, energy harvesting, and life sciences. Experimental platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks, which are available at the Technische Universität Ilmenau in the form of nanopositioning and nanomeasuring (NPM) machines. With this equipment, the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimeters.
Nanofabrication Approaches for Functional Three-Dimensional Architectures

Hangbo Zhao,Yongjun Lee,Mengdi Han,Bhupendra K. Sharma,Xuexian Chen,Jong-Hyun Ahn,John A. Rogers

DOI: https://doi.org/10.1016/j.nantod.2019.100825

IF: 17.4

2019-01-01

Nano Today

Abstract:Three-dimensional (3D) functional systems with sizes in the micro- and nanometer regime are of growing importance across a wide range of electrical, optical, and biological contexts. The unique functionalities of such platforms follow from engineering the shapes, geometries, and architectures of materials into 3D layouts. The main challenges are in developing techniques/methods with sufficient levels of resolution and with broad materials compatibility .The most successful routes include (1) top-down schemes that involve masking and selective material removal, often in repetitive sequences, (2) bottom-up strategies that rely on component assembly or materials deposition, (3) two-dimensional (2D) to 3D shape transformations triggered by internal forces or external stimuli, and more recently, (4) mechanically guided assembly driven by substrate deformations. This review highlights recent progress in these areas, with a focus on techniques with demonstrated capabilities in constructing functional 3D structures and/or devices with key dimensions in the nanoscopic regime, and on their demonstrated or potential applications. (C) 2019 Elsevier Ltd. All rights reserved.
From Cleanroom to Desktop: Emerging Micro-Nanofabrication Technology for Biomedical Applications

Tingrui Pan,Wei Wang

DOI: https://doi.org/10.1007/s10439-010-0218-9

IF: 3.8

2010-01-01

Annals of Biomedical Engineering

Abstract:This review is motivated by the growing demand for low-cost, easy-to-use, compact-size yet powerful micro-nanofabrication technology to address emerging challenges of fundamental biology and translational medicine in regular laboratory settings. Recent advancements in the field benefit considerably from rapidly expanding material selections, ranging from inorganics to organics and from nanoparticles to self-assembled molecules. Meanwhile a great number of novel methodologies, employing off-the-shelf consumer electronics, intriguing interfacial phenomena, bottom-up self-assembly principles, etc. , have been implemented to transit micro-nanofabrication from a cleanroom environment to a desktop setup. Furthermore, the latest application of micro-nanofabrication to emerging biomedical research will be presented in detail, which includes point-of-care diagnostics, on-chip cell culture as well as bio-manipulation. While significant progresses have been made in the rapidly growing field, both apparent and unrevealed roadblocks will need to be addressed in the future. We conclude this review by offering our perspectives on the current technical challenges and future research opportunities.
Nanofluidics: A New Arena for Materials Science

Yan Xu

DOI: https://doi.org/10.1002/adma.201702419

IF: 29.4

2017-11-02

Advanced Materials

Abstract:A significant growth of research in nanofluidics is achieved over the past decade, but the field is still facing considerable challenges toward the transition from the current physics-centered stage to the next application-oriented stage. Many of these challenges are associated with materials science, so the field of nanofluidics offers great opportunities for materials scientists to exploit. In addition, the use of unusual effects and ultrasmall confined spaces of well-defined nanofluidic environments would offer new mechanisms and technologies to manipulate nanoscale objects as well as to synthesize novel nanomaterials in the liquid phase. Therefore, nanofluidics will be a new arena for materials science. In the past few years, burgeoning progress has been made toward this trend, as overviewed in this article, including materials and methods for fabricating nanofluidic devices, nanofluidics with functionalized surfaces and functional material components, as well as nanofluidics for manipulating nanoscale materials and fabricating new nanomaterials. Many critical challenges as well as fantastic opportunities in this arena lie ahead. Some of those, which are of particular interest, are also discussed.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Grand Challenges for Nanoscience and Nanotechnology in Energy and Health.

Fan Zhang

DOI: https://doi.org/10.3389/fchem.2017.00080

IF: 5.5

2017-01-01

Frontiers in Chemistry

Abstract:During the past decade, new directions of modern research, broadly defined as nanoscale science and technology have emerged. Nanotechnology is not a separate scientific field, it is a complex platform for the existing disciplines of chemistry, physics, biology, medicine, neurology, information technology, and engineering, a new multidisciplinary scientific research area. In recent years, the nanotechnology has attract a great deal of attention in both synthesis methodologies and wide applications of medicine, energy, environmental, electronics etc. Despite of significant progress in nanotechnology and rise of many commercialized products involving nanomaterials, nanoscience, and technology are still facing many new challenges, especially in the areas of great concern to the public: energy and health.
Scanning Probe Lithography: State-of-the-Art and Future Perspectives

Pengfei Fan,Jian Gao,Hui Mao,Yanquan Geng,Yongda Yan,Yuzhang Wang,Saurav Goel,Xichun Luo

DOI: https://doi.org/10.3390/mi13020228

IF: 3.4

2022-01-29

Micromachines

Abstract:High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Nanoelectronics, Circuits and Nanoprocessors

Anqi Zhang,Gengfeng Zheng,Charles M. Lieber

DOI: https://doi.org/10.1007/978-3-319-41981-7_5

IF: 17.694

2016-01-01

NanoScience and Technology

Abstract:As electronic device features have been pushed into the deep sub-100-nm regime, conventional scaling strategies in the semiconductor industry have faced technological and economic challenges. Electronics obtained through the bottom-up approach of molecular-level control of material composition and structure may lead to devices and fabrication strategies as well as new architectures not readily accessible or even possible within the context of the top-down driven industry and manufacturing infrastructure. This chapter presents a summary of recent advances in basic nanoelectronics devices, simple circuits and nanoprocessors assembled by semiconductor NWs.
Strain Enhanced Functionality In A Bottom-Up Approach Enabled 3d Super-Nanocomposites

Aiping Chen,Zach Harrell,Ping Lu,Erik Enriquez,Leigang Li,Bruce Zhang,Paul Dowden,Chonglin Chen,Haiyan Wang,Judith L. MacManus‐Driscoll,Quanxi Jia

DOI: https://doi.org/10.1002/adfm.201900442

IF: 19

2019-01-01

Advanced Functional Materials

Abstract:The ability to control nanoparticle size, concentration, and distribution in epitaxial nanocomposite films has been a formidable challenge in the synthesis of nanostructured composite materials. Here, a novel 3D super-nanocomposite (3D-sNC) architecture is successfully demonstrated by integrating superlattice and vertically aligned nanocomposite structures. In the 3D-sNC architecture, the feature size and distribution of the nanocylinders such as the height/lateral dimension and the vertical/lateral spacing of nanocylinders can be precisely controlled. The microstructure parameters such as nanocylinder height and spacing modulated interfacial area control the lattice strain, which further tunes the magnetotransport property. These results demonstrate that 3D-sNC is a simple and yet effective architecture to achieve controlled functionalities via the precise control of nanocylinder size, spacing, concentration, and distribution. Such a 3D-sNC structure can be used to design advanced nanostructures with desired physical properties for a variety of material systems.
Nano-Fabrication and Nano-Electron Devices

LIU Ming,XIE Chang-qing,WANG Cong-shun,LONG Shi-bing,LI Zhi-gang,YILI Cheng-rong,TU De-yu

DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.09.001

2005-01-01

Abstract:Some progress on top-down nano-fabrication, such as electron beam lithography,X-ray lithography and EUV lithography were introduced. The progress and challenge on quantum mechanism nano-devices such as SET, RTD and molecular device were also investigated.
Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces

Jeetendra Gour,Sebastian Beer,Pallabi Paul,Alessandro Alberucci,Michael Steinert,Adriana Szeghalmi,Thomas Siefke,Ulf Peschel,Stefan Nolte,Uwe Detlef Zeitner

DOI: https://doi.org/10.1515/nanoph-2024-0343

IF: 7.5

2024-08-30

Nanophotonics

Abstract:In the rapidly evolving field of plasmonic metasurfaces, achieving homogeneous, reliable, and reproducible fabrication of sub-5 nm dielectric nanogaps is a significant challenge. This article presents an advanced fabrication technology that addresses this issue, capable of realizing uniform and reliable vertical nanogap metasurfaces on a whole wafer of 100 mm diameter. By leveraging fast patterning techniques, such as variable-shaped and character projection electron beam lithography (EBL), along with atomic layer deposition (ALD) for defining a few nanometer gaps with sub-nanometer precision, we have developed a flexible nanofabrication technology to achieve gaps as narrow as 2 nm in plasmonic nanoantennas. The quality of our structures is experimentally demonstrated by the observation of resonant localized and collective modes corresponding to the lattice, with Q-factors reaching up to 165. Our technological process opens up new and exciting opportunities to fabricate macroscopic devices harnessing the strong enhancement of light–matter interaction at the single nanometer scale.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Laser-based Micro/nanofabrication in One, Two and Three Dimensions

Wei Xiong,Yunshen Zhou,Wenjia Hou,Lijia Jiang,Masoud Mahjouri-Samani,Jongbok Park,Xiangnan He,Yang Gao,Lisha Fan,Tommaso Baldacchini,Jean-Francois Silvain,Yongfeng Lu

DOI: https://doi.org/10.1007/s12200-015-0481-3

2015-01-01

Frontiers of Optoelectronics

Abstract:Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.
Nanomechanical Resonators: Toward Atomic Scale

Bo Xu,Pengcheng Zhang,Jiankai Zhu,Zuheng Liu,Alexander Eichler,Xu-Qian Zheng,Jaesung Lee,Aneesh Dash,Swapnil More,Song Wu,Yanan Wang,Hao Jia,Akshay Naik,Adrian Bachtold,Rui Yang,Philip X.-L. Feng,Zenghui Wang

DOI: https://doi.org/10.1021/acsnano.2c01673

IF: 17.1

2022-09-03

ACS Nano

Abstract:The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing...

materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
Nanogap Structures: Large‐Scale Sub‐1‐nm Random Gaps Approaching the Quantum Upper Limit for Quantitative Chemical Sensing (Advanced Optical Materials 24/2020)

Nan Zhang,Haifeng Hu,Matthew Singer,Kuang‐hui Li,Lyu Zhou,Boon S. Ooi,Qiaoqiang Gan

DOI: https://doi.org/10.1002/adom.202070095

IF: 9

2020-12-01

Advanced Optical Materials

Abstract:<p>Significantly enhancing localized optical fields enables the investigation of boosted light–matter interaction within extreme dimensions. In article number <a href="https://doi.org/10.1002/adom.202001634">2001634</a>, Qiaoqiang Gan and co‐workers report a new strategy to fabricate a high‐density random metallic nanopattern with accurately controlled nanogaps that approaches the upper limit of quantum plasmonic enhancement via atomic‐layer‐deposition and self‐assembled‐monolayer processes. These structures are fabricated with record‐high uniformity over large areas, demonstrating their potential for quantitative sensing of chemicals in a scalable and repeatable fashion. </p>

materials science, multidisciplinary,optics
Review article: Fabrication of nanofluidic devices.

Chuanhua Duan,Wei Wang,Quan Xie

DOI: https://doi.org/10.1063/1.4794973

2013-01-01

Biomicrofluidics

Abstract:Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed.
Scalable, Green Fabrication of Single-Crystal Noble Metal Films and Nanostructures for Low-Loss Nanotechnology Applications

Sasan V. Grayli,Xin Zhang,Finlay C. MacNab,Saeid Kamal,Dmitry Star,Gary W. Leach

DOI: https://doi.org/10.1021/acsnano.0c03466

IF: 17.1

2020-05-13

ACS Nano

Abstract:The confinement of spatially extended electromagnetic waves to nanometer-scale metal structures can be harnessed for application in information processing, energy harvesting, sensing, and catalysis. Metal nanostructures enable negative refractive index, subwavelength resolution imaging, and patterning through engineered metamaterials and promise technologies that will operate in the quantum plasmonics regime. However, the controlled fabrication of high-definition single-crystal subwavelength metal nanostructures has remained a significant hurdle due to the tendency for polycrystalline metal growth using conventional physical vapor deposition methods and the challenges associated with placing solution-grown nanocrystals in desired orientations and locations on a surface to manufacture functional devices. Here, we introduce a scalable and green wet chemical approach to monocrystalline noble metal thin films and nanostructures. The method enables the fabrication of ultrasmooth, epitaxial, single-crystal films of controllable thickness that are ideal for the subtractive manufacture of nanostructures through ion beam milling and additive crystalline nanostructure <i>via</i> lithographic patterning for large-area, single-crystal metasurfaces and high aspect ratio nanowires. Our single-crystal nanostructures demonstrate improved feature quality, pattern transfer yield, reduced optical and resistive losses, and tailored local fields to yield greater optical response and improved stability compared to those of polycrystalline structures—supporting greater local field enhancements and enabling practical advances at the nanoscale.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsnano.0c03466?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsnano.0c03466</a>.Electroless growth of noble metal films, standard reduction potential determination, cyclic voltammetry, SEM imaging, AFM surface roughness analysis, SEM grain size analysis, spectroscopic ellipsometry, ultrathin film deposition, focused ion beam nanopatterning, electroless deposition of Ag(100) and Ag(100) nanopillars, nanopillar array fabrication, two-dimensional X-ray diffraction geometry, cross-sectional SEM (<a class="ext-link" href="/doi/suppl/10.1021/acsnano.0c03466/suppl_file/nn0c03466_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
Editorial for the Special Issue on Nanomaterials Photonics

Raul Rangel-Rojo,Luciana R. P. Kassab,Tiziana Cesca

DOI: https://doi.org/10.3390/mi15101268

IF: 3.4

2024-10-19

Micromachines

Abstract:Back in 1959, Richard Feynman, in his famous lecture, stated that "There is plenty of room at the bottom", which made us aware of the possibilities of nanotechnology, i [...]

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Current and Future Trends for Polymer Micro/Nanoprocessing in Industrial Applications (Adv. Mater. 52/2022)

Dan Chen,Yunming Wang,Helezi Zhou,Zhigao Huang,Yun Zhang,Chuan Fei Guo,Huamin Zhou

DOI: https://doi.org/10.1002/adma.202270363

IF: 29.4

2022-12-30

Advanced Materials

Abstract:Polymer Micro/Nanoprocessing With advancements in micro/nanoprocessing techniques and more demanding application requirements, it is becoming necessary to realize the high‐resolution fabrication of polymers to prepare miniaturized devices. In article number 2200903, Chuan Fei Guo, Huamin Zhou, and co‐workers review the state‐of‐the‐art advances on polymer micro/nanoprocessing and give future perspectives for fabrication and applications of various polymer‐based elements and devices.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Three-dimensional mesostructures as high-temperature growth templates, electronic cellular scaffolds, and self-propelled microrobots

Zheng Yan,Mengdi Han,Yan Shi,Adina Badea,Yiyuan Yang,Ashish Kulkarni,Erik Hanson,Mikhail E Kandel,Xiewen Wen,Fan Zhang,Yiyue Luo,Qing Lin,Hang Zhang,Xiaogang Guo,Yuming Huang,Kewang Nan,Shuai Jia,Aaron W Oraham,Molly B Mevis,Jaeman Lim,Xuelin Guo,Mingye Gao,Woomi Ryu,Ki Jun Yu,Bruno G Nicolau,Aaron Petronico,Stanislav S Rubakhin,Jun Lou,Pulickel M Ajayan,Katsuyo Thornton,Gabriel Popescu,Daining Fang,Jonathan V Sweedler,Paul V Braun,Haixia Zhang,Ralph G Nuzzo,Yonggang Huang,Yihui Zhang,John A Rogers,Mikhail E. Kandel,Aaron W. Oraham,Molly B. Mevis,Bruno G. Nicolau,Stanislav S. Rubakhin,Pulickel M. Ajayan,Jonathan V. Sweedler,Paul V. Braun,Ralph G. Nuzzo,John A. Rogers

DOI: https://doi.org/10.1073/pnas.1713805114

IF: 11.1

2017-10-25

Proceedings of the National Academy of Sciences

Abstract:Significance Exploiting advanced 3D designs in micro/nanomanufacturing inspires potential applications in various fields including biomedical engineering, metamaterials, electronics, electromechanical components, and many others. The results presented here provide enabling concepts in an area of broad, current interest to the materials community––strategies for forming sophisticated 3D micro/nanostructures and means for using them in guiding the growth of synthetic materials and biological systems. These ideas offer qualitatively differentiated capabilities compared with those available from more traditional methodologies in 3D printing, multiphoton lithography, and stress-induced bending––the result enables access to both active and passive 3D mesostructures in state-of-the-art materials, as freestanding systems or integrated with nearly any type of supporting substrate.
Top-down Structure and Device Fabrication Using in Situ Nanomachining

XD Li,XN Wang,QH Xiong,PC Eklund

DOI: https://doi.org/10.1063/1.2139991

IF: 4

2005-01-01

Applied Physics Letters

Abstract:We demonstrate the potential of an alternative tool for the fabrication of nanoscale structures and devices. A nanoindenter integrated with an atomic force microscope is shown to be a powerful machine tool for cutting precise length nanowires or nanobelts and for manipulating the shortened wires. We also demonstrate its utility in cutting grooves and fabricating dents (or periodic arrays of dents) in ZnS nanobelts. This approach permits the direct mechanical machining of nanodevices that are supported on a substrate without the inherent complications of e beam or photolithography.

Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Nanofabrication Approaches for Functional Three-Dimensional Architectures

From Cleanroom to Desktop: Emerging Micro-Nanofabrication Technology for Biomedical Applications

Nanofluidics: A New Arena for Materials Science

Grand Challenges for Nanoscience and Nanotechnology in Energy and Health.

Scanning Probe Lithography: State-of-the-Art and Future Perspectives

Nanoelectronics, Circuits and Nanoprocessors

Strain Enhanced Functionality In A Bottom-Up Approach Enabled 3d Super-Nanocomposites

Nano-Fabrication and Nano-Electron Devices

Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces

Laser-based Micro/nanofabrication in One, Two and Three Dimensions

Nanomechanical Resonators: Toward Atomic Scale

Nanogap Structures: Large‐Scale Sub‐1‐nm Random Gaps Approaching the Quantum Upper Limit for Quantitative Chemical Sensing (Advanced Optical Materials 24/2020)

Review article: Fabrication of nanofluidic devices.

Scalable, Green Fabrication of Single-Crystal Noble Metal Films and Nanostructures for Low-Loss Nanotechnology Applications

Editorial for the Special Issue on Nanomaterials Photonics

Current and Future Trends for Polymer Micro/Nanoprocessing in Industrial Applications (Adv. Mater. 52/2022)

Three-dimensional mesostructures as high-temperature growth templates, electronic cellular scaffolds, and self-propelled microrobots

Top-down Structure and Device Fabrication Using in Situ Nanomachining