Abstract:A precision patterning sub-nanometrology in a single quantum state such as a single electron, a single photon, a single atom, a single molecule, etc. leads an international technology roadmap for semiconductors (ITRS) to quantum noise limits, where quantum effects occur in a sub-nanometer (sub-nm) real space with ultra-fast time and frequency resolutions. Classical metrology technologies face challenges, due to failure to achieve such a transient resolution. In response to the cutting-edge issue, a precision patterning sub-nanometrology relied up a pico-meter quantum sensing approach was developed to satisfy a precision sub-nanometrology need, wherein a conducting atomic force microscopy (C-AFM) coupling a laser micro-photoluminescence (micro-PL) spectroscopy was a state-of-the art height-current-phase uncertainty correlation reproducible traceable precision sub-nanometrology technology with a powerful pico-meter (pm) spatial resolution associated with transient quantized pico-ample differential current-nominal voltage resolutions relied up a quantum electrical measurement triangle principle. A self-assembled vertical nanomedicine photoluminescence crystal array with an atomic interference effect was revealed in Figure 1 and a quantum regenerative amplification principle was discussed. It is concluded that a precision patterning sub-nanometrology relied up a pico-meter quantum sensing approach provides a new impetus for an integrated circuit scaling and paves a way towards developing quantum-level self-alignment patterning technologies to support precision quantum sensing and metrological device innovations and beyond, which are important for quality-profit upgrades and global industry developments.

Nanogap Structures: Large‐Scale Sub‐1‐nm Random Gaps Approaching the Quantum Upper Limit for Quantitative Chemical Sensing (Advanced Optical Materials 24/2020)

Large‐Scale Sub‐1‐nm Random Gaps Approaching the Quantum Upper Limit for Quantitative Chemical Sensing

Experimental and Theoretical Investigation of Macro-Periodic and Micro-Random Nanostructures with Simultaneously Spatial Translational Symmetry and Long-Range Order Breaking

High-Throughput Fabrication of Ultradense Annular Nanogap Arrays for Plasmon-Enhanced Spectroscopy

High-Throughput Fabrication of Triangular Nanogap Arrays for Surface-Enhanced Raman Spectroscopy

Efficient Mid‐Infrared Light Confinement Within Sub‐5‐nm Gaps for Extreme Field Enhancement

Atomic layer deposition assisted fabrication of large-scale metal nanogaps for surface enhanced Raman scattering

Quantum mechanical effects in plasmonic structures with subnanometre gaps

Quasi Optical Cavity of Hierarchical ZnO Nanosheets@Ag Nanoravines with Synergy of Near- and Far-Field Effects for in Situ Raman Detection.

Wafer Scale Fabrication of Highly Dense and Uniform Array of Sub-5 Nm Nanogaps for Surface Enhanced Raman Scatting Substrates.

Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition

Switching plasmonic nanogaps between classical and quantum regimes with supramolecular interactions

Probing the Mechanisms of Strong Fluorescence Enhancement in Plasmonic Nanogaps with Sub-nanometer Precision

Sub-5 nm nanogap electrodes towards single-molecular biosensing

Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces

Complex 3-Dimensional Microscale Structures for Quantum Sensing Applications

Atomic-Layer-Deposition Assisted Formation of Wafer-Scale Double-Layer Metal Nanoparticles with Tunable Nanogap for Surface-Enhanced Raman Scattering

Plasmonic Nanogaps: From Fabrications to Optical Applications

Integrated “Hot Spots”: Tunable Sub‐10 nm Crescent Nanogap Arrays

Precision Patterning Sub-Nanometrology Relied Up Pico-Meter Quantum Sensing Approach

Molecule Sensing: Sculpting Extreme Electromagnetic Field Enhancement in Free Space for Molecule Sensing (small 33/2018)