Abstract:We achieved high performance high speed silicon photonics carrier-depletion Mach-Zehnder modulation with commercial foundry by co-optimization of doping and device design assisted with an accurate electro-optical (EO) model. We demonstrated high performance IQ modulators operating at 85 Gbaud 16 QAM and 64 Gbaud 64 QAM with extinction ratio of over 25 dB. For the design of the high performance all-silicon carrier depletion modulator, we developed modeling and design tools to provide not only accuracy, but also efficiency in the simulation of distributed optical and electronic characteristics of travelling waveguides with different designs of optical and microwave waveguides under various doping conditions, which allow the co-design of velocity phase match between optical and microwave waveguides and the impedance match between microwave travelling waveguide and terminal impedance. Our experimental characterization test data agreed well with the model simulation data. More recently, with practical Nyquist filter and linear compensation in commercial arbitrary wave generator (AWG) and optical modulation analyzer (OMA), we demonstrated 100 Gbaud 32 QAM with an all-silicon IQ modulator, which has 6 dB electro-optical bandwidth of 50 GHz and BER achieving FEC threshold with a modern FEC, showing the potential for Tb/s applications.

Design of high extinction ratio silicon optical modulator using cascade compensation method

Design of a High Extinction Ratio Silicon Optical Modulator at 2 Μm Using the Cascaded Compensation Method

Second Harmonic Distortion Comparison of Mach-Zehnder Silicon Modulators Based on Lateral and Interdigitated PN Junctions

High-speed, low-loss silicon Mach-Zehnder modulators with doping optimization.

Improved Extinction Ratio of Mach-Zehnder Based Optical Modulators on CMOS Platform

High Linearity Silicon Modulator Capable of Actively Compensating Input Distortion.

High Carrier Suppression Double Sideband Modulation Using Polarization State Rotation Filter and Optical External Modulator

Design and Electro-Optical Co-Optimization of High-Speed Travelling Wave Silicon-Organic Hybrid Modulators

A Silicon Optical Single Sideband Modulator with Ultra-High Sideband Suppression Ratio

Highly linear silicon Mach-Zehnder modulators with optimized phase-shifter

Highly Efficient Silicon Michelson Interferometer Modulators

High-speed Silicon Modulators for the 2 Μm Wavelength Band

Linearity Comparison of Silicon Carrier-Depletion-Based Single, Dual-Parallel, and Dual-Series Mach–Zehnder Modulators

High speed silicon Mach-Zehnder modulator based on interleaved PN junctions.

Influence of Photocarriers to Silicon Optical Modulator Based on Reverse-Biased Pn Diode at 1550 Nm Wavelength

Optimization and Demonstration of a Large-bandwidth Carrier-depletion Silicon Optical Modulator

Influence of Doping Position on the Extinction Ratio of Mach-Zehnder-Interference Based Silicon Optical Modulators

Silicon Dual-Series Mach-Zehnder Modulator with High Linearity

Silicon-based CMOS Photonic Devices Using Carrier Dispersion Effect

High Baud Rate All-Silicon Photonics Carrier Depletion Modulators

Single Chip Silicon Single Sideband Modulator with High Sideband Suppression Ratio