A Multi-Channel Tunable Periodic Narrowband Filter Chip Composed of Cascaded Silicon Nitride Microring Resonators

Runliang Zhu,Feifei Yin,Xin Wan,Yitang Dai,Kun Xu
DOI: https://doi.org/10.1109/icocn53177.2021.9563781
2021-01-01
Abstract:A multi-channel tunable periodic narrowband filter chip composed of cascaded silicon nitride (Si3N4) microring resonators (MRR) is proposed and implemented in this paper. We have assembled eight MRRs with the same structure on a silicon based chip with a size of 9mm*1.8mm. The waveguide material is silicon nitride with low transmission loss, and its transmission loss is about 0.2dB/cm. The central wavelength of the MRR can be tuned by thermal-optical effect. The experimental results show that the FSR is about 260GHz, the channel's 3dB bandwidth range is 0.7B-1.33GHz, the thermal modulation coefficient is about 0.33GHz/mW, and the central frequency tuning range is about 60GHz. The chip has the following features, including multi-channel, narrow bandwidth and wide tuning range, which can be used in microwave photonic system instead of traditional optical filters.
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