Proposal of a thermally-tunable silicon-on-insulator microring resonator filter

Daoxin Dai,Liu Yang

DOI: https://doi.org/10.1109/AOE.2007.4410882

2008-01-01

Abstract:An ultrasmall microring resonator (MRR) based on silicon-on-insulator nanowires is presented. The metal circuit along the microring is used as a submicron heater. For the fabrication of the present thermally-tunable MRR, only a single lithography process is needed.

What problem does this paper attempt to address?

Ultrasmall Thermally Tunable Microring Resonator With a Submicrometer Heater on Si Nanowires

Daoxin Dai,Liu Yang,Sailing He

DOI: https://doi.org/10.1109/JLT.2007.915274

2008-01-01

Abstract:An ultracompact widely tunable thermooptical (TO) microring resonator (MRR) filter based on Si nanowires is presented. The Si nanowire waveguide has a insulator, Si core, a up-cladding, and a thin metal film at the top. The metal circuit along the microring is used as a submicrometer heater which has the same width as the Si nanowire waveguide. The up-cladding is optimized to reduce the light absorption of the metal as well as to have a good heat-conduction from the heater to the Si core. Two pads used as the contact points for the probes connecting to the electrical power are perpendicularly connected to the microring by using optimized T-junctions (with a low excess loss of about 0.06 dB per T-junction). With such a design, the present thermally tunable microring resonator (MRR) can be fabricated by using a standard fabrication process with a single lithography process, which is much simpler than the fabrication with double lithography processes used for the conventional TO components. Finally, the simulation results show that the designed MRR has a wide tuning range of about 20 nm with a low heating power of 5 mW.
Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Li Xia,Wang Chao,Yu Hui,Jiang Xiaoqing

DOI: https://doi.org/10.3788/aos201636.1223002

2016-01-01

Acta Optica Sinica

Abstract:Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90％ at the wavelength of 1549 nm,the quality factor is 3 × 104,and the free spectral range (FSR) is 9.6 nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5 mW.
Thermally tunable filters based on third-order microring resonators for WDM applications

Ting Hu,Wanjun Wang,Chen Qiu,Ping Yu.,Huiye Qiu,Yong Zhao,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/LPT.2012.2182988

IF: 2.6

2012-01-01

IEEE Photonics Technology Letters

Abstract:We design and fabricate a thermally tunable third-order microring resonator filter based on silicon nanowire waveguides. Box-like response with low intraband ripple (~0.65 dB) and high out-of-band rejection over 40 dB is demonstrated. The insertion loss at the center of the passband is less than 0.9 dB. The filter response is successfully tuned by one free spectral range through thermo-optic effec...
Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Qiu Chen,Hu Ting,Wang Wan-Jun,Yu Ping,Jiang Xiao-Qing,Yang Jian-Yi

DOI: https://doi.org/10.1088/0256-307x/29/9/094204

2012-01-01

Chinese Physics Letters

Abstract:A channel-selectable optical link based on a silicon microring resonator is proposed and demonstrated.This optical link consists of the wavelength-tunable microring modulators and the filters,defined on a silicon-on-insulator (SOI) platform.With a p-i-n junction embedded in the microring modulator,light at the resonant wavelength of the ring resonator is modulated.The 2nd-order microring add-drop filter routes the modulated light.The channel selectivity is demonstrated by heating the microrings.With a thermal tuning efficiency of 5.9mW/nm,the filter drop port response was successfully tuned with 0.8nm channel spacing.We also show that modulation can be achieved in these channels.This device aims to offer flexibility and increase the bandwidth usage efficiency in optical interconnection.
Bandwidth and Wavelength Tunable Optical Passband Filter Based on Silicon Multiple Microring Resonators.

Tingge Dai,Ao Shen,Gencheng Wang,Yuehai Wang,Yubo Li,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1364/ol.41.004807

IF: 3.6

2016-01-01

Optics Letters

Abstract:An ultra-compact silicon bandpass filter with wide bandwidth tunability is proposed and experimentally demonstrated. The filter architecture is based on a multiple micro-ring resonator-cascaded structure. A wide bandwidth tunability (from 75 to 300 GHz) can be achieved by controlling the resonant frequency of the microring resonators when a good shape factor (0.24-0.44) is held. The filter has a wide free spectral range (about 1.2 THz). The center wavelength can be tuned over several nanometers linearly. The footprint is only 0.053 mm(2). (C) 2016 Optical Society of America.
Thermally Tunable High-Order Microring Filters with Large Free-Spectral-range

Jiamei Gu,Zhaoyu Wang,Xin Chen,Xiao Ma,Mingyu Li,Jianjun He

DOI: https://doi.org/10.1117/12.3000512

2023-01-01

Abstract:We propose a high-order microring filter structure based on the Silicon-On-Insulator (SOI) platform for flattening filtering. This filter structure can achieve a box-like spectral response with large free-spectral-range (FSR) and high out-of-band extinction ratio (ER), which can be widely used in various fields, especially in the wavelength division multiplexing. The filter consists of two or more rings which are connected in series, with Ti electrodes added on them for thermal tuning. According to the proposed requirements of spectral bandwidth and FSR, the physical dimensions of the high-order microring filter structure can be calculated based on theoretical formulas, and we optimize them for better performance. The relationship of the coupling coefficients of each coupling zone is calculated based on the Butterworth spectral responses. Result shows that the higher-order filter has steeper rise-fall edges and a flatter top, and can be designed to achieve a larger FSR. The FSR of the fourth-order microring filter can be designed to 78.4 nm, with ER of 12.6 dB, and the insertion loss of 1.1 dB. The fluctuations at the top of the box-like spectra caused by the fabrication deviations can be compensated by applying voltages to Ti electrodes, which can change the effective refractive index of the waveguide.
Optical Micro-Ring Resonators on Silicon for Optical Communications and Optical Sensing

Daoxin Dai

DOI: https://doi.org/10.1109/piers.2016.7734989

2016-01-01

Abstract:Silicon-based optical micro-ring resonators (MRRs) are very popular for many application because of the ultra-compact footprint and easy fabrication. The wavelength-selectivity property of MRRs makes it possible to be used not only as an optical filter with a narrow bandwidth but also as an optical sensor with high sensitivity. This paper gives a review of our recent work on the MRRs on silicon. First, a high-order MRR optical filter with a box-like filtering response is realized by introducing bent directional couplers to have sufficient coupling between the access waveguide and the microrings. A efficient thermally-tunable MRR-based optical filter with graphene transparent nano-heater is realized by introducing transparent graphene nanoheaters, which contact the silicon core directly without any isolator layer. As a result, the heating efficiency, the temporal response and the achievable temperature is improved in comparison with a traditional metal heater. MRRs are also very attractive for the applications of optical sensing and two novel designs of MRRs for optical sensing are presented. One is a digital optical sensor based on two cascaded MRRs with different free spectral ranges (FSRs), which was proposed and realized to achieve extremely high sensitivity. The other is a Mach-Zehnder interferometer (MZI) coupled microring, which has only one resonant wavelength with a high extinction ratio in a very large wavelength span and consequently a very large quasi-FSR (free spectral range) is achieved (FSR > 120 nm). This enables a large measurement range for the change of refractive index. In this paper, we give a review of our recent work on the optical MRRs on silicon and their applications.
Bandwidth and Wavelength Tunable Optical Filter Based on Silicon Multiple Microring Resonators

Ao Shen,Gencheng Wang,Tingge Dai,Chen Qiu,Yubo Li,Yuehai Wang,Yinlei Hao,Xiaoqing Jiang,Mei Yang,Jianyi Yang

DOI: https://doi.org/10.1109/group4.2015.7305927

IF: 3.6

2016-01-01

Optics Letters

Abstract:We demonstrate a silicon multiple microring based optical (liter with tunable bandwidth and wavelength. The bandwidth can be tuned from 0.6 to 2.8 nm and the wavelength can be tuned over several nanometers.
Dual-band Optical Filter Based on a Single Microring Resonator Embedded with Nanoholes

Zecen Zhang,Geok Ing Ng,Haodong Qiu,Xin Guo,Mohamed Said Rouifed,Chongyang Liu,Hong Wang

DOI: https://doi.org/10.1109/cleopr.2017.8119016

2017-01-01

Abstract:A dual-band optical filter based on a single microring resonator embedded with nanoholes is theoretically and experimentally demonstrated for the first time. A numerical model based on transfer matrix method is utilized to simulate the performance of this device. The coupling between the microring resonator and the Fabry-Pérot resonator formed by nanoholes gives rise to the dual-band optical filtering spectrum. In our experiment, a single microring resonator embedded with nanoholes was fabricated on a commercial 220-nm-thick-top-silicon silicon-on-insulator (SOI) platform. Good performance was achieved with measured extinction ratio of 9 dB, insertion loss of lower than 1 dB, and quality factor of 11900. Both experimental and simulation results are in good agreement.
Polarization-Insensitive Ultrasmall Microring Resonator Design Based on Optimized Si Sandwich Nanowires

Zhechao Wang,Daoxin Dai,Sailing He

DOI: https://doi.org/10.1109/lpt.2007.903889

IF: 2.6

2007-01-01

IEEE Photonics Technology Letters

Abstract:Bent Si sandwich nanowires are used and optimized to obtain an ultrasmall polarization-insensitive microring resonator (MRR). The used Si sandwich nanowire has a low refractive index layer between two Si layers with high refractive indexes. By optimizing the refractive index and thickness of the sandwiched layer, the bent Si sandwich nanowire becomes nonbirefringent theoretically. The designed nonbirefringent nanowire has a relatively good fabrication tolerance. By using such a nonbirefringent bent Si sandwich nanowire, an ultrasmall polarization-insensitive MRR is designed.
On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Chen Qiu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/pgc.2012.6458084

2012-01-01

Abstract:An on-chip interrogator for wavelength-modulated optical sensors is developed based on a thermal tunable silicon microring resonator. The center wavelength of the sensors can be readout from the tuning power corresponding to the peak optical output intensity of the system by scanning the resonant wavelength of the microring filter. Both on-chip (microring) and off-chip (FBG) wavelength-modulated sensor are interrogated by our microring interrogator.
Thermally-Tuned Silicon Double Ring Resonator for External Cavity Tunable Laser

Lei Ding,Xianxin Jiang,Chang Yang,Jian-Jun He

2014-01-01

Abstract:We designed and fabricated a thermo-optic tunable filter based on silicon double ring resonator for external cavity laser. The footprint of the device is similar to 700 mu m x 400 mu m. The tuning range is about 16 nm and the tuning efficiency of the device is estimated to be about 0.56 nm/mW, owing to the Vernier effect.
Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Zecen Zhang,Geok Ing Ng,Haodong Qiu,Wanjun Wang,Xin Guo,Mohamed S Rouifed,Chongyang Liu,Hong Wang

DOI: https://doi.org/10.1364/AO.56.005444

IF: 1.9

2017-01-01

Applied Optics

Abstract:Compact all-pass and add-drop microring resonators (radius=10 μm) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal-oxide-semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.
Second-Order Microring Filter with Large Free-Spectral-Range and Wavelength-Tunable-Range over 50 Nm

Jiamei Gu,Shuojian Zhang,Qiongchan Shao,Mingyu Li,Xiao Ma,Jian-Jun He

DOI: https://doi.org/10.3390/photonics11090870

IF: 2.536

2024-01-01

Photonics

Abstract:The high-order microring filter has been proposed for a larger free spectral range (FSR) compared with the single microring filter; therefore, it has great potential to be used in wavelength division multiplexing (WDM) systems. In this article, we have designed and fabricated a second-order microring filter made up of two rings connected in series with two Ti thermal heaters deposited above them. The large FSR of 56.8 nm is obtained by decreasing the difference of the radii between the two series rings, achieving similar FSRs to that of higher-order filters but with a simpler and more compact design. The average electrical tuning efficiencies of the two heaters are 0.186 nm/mW and 0.207 nm/mW, and the center wavelength of the filter can be tuned over the entire FSR with an applied electrical power of less than 40 mW.
Power-efficient polarization-insensitive tunable microring filter on a multi-layer Si3N4-on-SOI platform

Xin Li,Liangjun Lu,Jianping Chen,Linjie Zhou

DOI: https://doi.org/10.1364/OL.498636

2023-09-15

Abstract:We develop and demonstrate a non-duplicate polarization-diversity tunable bandpass optical filter by leveraging the bi-directional transmission of add-drop dual-coupled microring resonators (MRRs) on a multi-layer Si3N4-on-silicon-on-insulator (SOI) platform. By using Euler-bends, we implement compact and low-loss Si3N4 MRRs with an equivalent bending radius of ∼38 µm. Fiber-to-fiber (on-chip) insertion loss of 4.3 dB (1.7 dB) with a low polarization-dependent loss of <0.5 dB and low differential group delay of <2.5 ps is achieved. The extinction ratio is more than 30 dB. The thermo-optic tuning efficiency of the Si3N4 MRRs is improved with a suspended micro-heater design. As a result, a wavelength tuning range of ∼2 nm and a 3-dB bandwidth tuning range of 20 GHz are experimentally demonstrated. The tuning efficiency is 33 pm/mW, which is ∼7.5 times higher than the previous design. This reconfigurable polarization-insensitive filter, with low loss, low cross talk, and high power efficiency, is highly promising for practical applications in optical communication and signal processing.
Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Kang Xiong,Xi Xiao,Ying-Tao Hu,Zhi-Yong Li,Tao Chu,Yu-De Yu,Jin-Zhong Yu

DOI: https://doi.org/10.1088/1674-1056/21/7/074203

2012-01-01

Abstract:We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simulations using the three-dimensional finite-difference time-domain method show that the novel elliptical microring can efficiently enhance the mode coupling between straight bus waveguides and resonator waveguides or between adjacent resonators while preserving relatively high intrinsic quality factors with large free spectral range. The proposed resonator would be an alternative choice for future high-density integrated photonic circuits.
Versatile Tunning of Compact Microring Waveguide Resonator Based on Lithium Niobate Thin Films

Qijing Lin,Yuanzhi Hu,Yang Li,Huajiang Chen,Runhao Liu,Gang Tian,Wentao Qiu,Tiefeng Yang,Heyuan Guan,Huihui Lu

DOI: https://doi.org/10.3390/photonics10040424

IF: 2.536

2023-01-01

Photonics

Abstract:With the advancement of modulation technology and the requirement for device miniaturization and integration, lithium niobate on insulator (LNOI) can be a versatile platform for this pursuit, as it can confine the transmitted light at the nanoscale, leading to a strong light–matter interaction, which can sensitively capture external variations, such as electric fields and temperature. This paper presents a compact microring modulator with versatile tuning based on X-cut LNOI. The LNOI modulator equipped with electrodes with a coverage angle of 120∘ achieved a maximum electro-optic (EO) tuning efficiency of 13 pm/V and a maximum extinction ratio of 11 dB. The asymmetry in the static or quasi-static electro-optic tuning of the microring modulator was also analyzed. Furthermore, we measured the thermal-optic effect of the device with a sensitivity of 26.33 pm/∘C, which can potentially monitor the environment temperature or compensate for devices’ functional behavior. The demonstrated efficient and versatile compact microring modulator will be an important platform for on-chip active or passive photonic components, microring-based sensor arrays and integrated optics.
A Tunable Broadband Photonic RF Phase Shifter Based on a Silicon Microring Resonator

Qingjiang Chang,Qiang Li,Ziyang Zhang,Tong Ye,Yikai Su

DOI: https://doi.org/10.1109/LPT.2008.2008658

2009-01-01

Abstract:We propose and demonstrate a tunable broadband photonic radio frequency (RF) phase shifter based on a silicon microring resonator. This scheme utilizes the thermal nonlinear effect of the silicon microring to change the electrical phase of the RF signal with a wide tuning range. A prototype of the phase shifter is experimentally demonstrated for a 40-GHz signal with a 0-4.6-rad tuning range.
Scalable Bandwidth-Tunable Micro-Ring Filter Based on Multi-Channel-Spectrum Combination

Tingge Dai,Gencheng Wang,Xiaoqin Guo,Chen Bei,Jianfei Jiang,Weiwei Chen,Yuehai Wang,Hui Yu,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2018.2826724

IF: 2.6

2018-01-01

IEEE Photonics Technology Letters

Abstract:We propose and experimentally demonstrate a scalable bandwidth-tunable bandpass filter on silicon. Its spectrum is combined by that of four channels and each channel is formed by two cascaded micro-ring resonators (MRRs). By tuning the center wavelength spacing of the eight MRRs and the phase shifts of four channels, a wide bandwidth tuning range from 37.5 GHz to 227.5 GHz can be achieved with a shape factor between 0.2 and 0.73 and an in-band ripple less than 1 dB. By comparing with the performance of three-channel and two-channel structures, we can draw the conclusion that inducing more channels can effectively improve the bandwidth tunability. The filter also has a wide free spectral range (about 1.2 THz) and small footprint (0.12 mm(2)).
Tunable Microring Filter Based On-Chip Interrogator for Wavelength-Modulated Optical Sensor

Jian Yang,Chen Qiu,Qilong Wang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.4028/www.scientific.net/kem.562-565.265

2013-01-01

Key Engineering Materials

Abstract:We demonstrated a novel approach for the interrogation of wavelength-modulated optical sensors. The interrogator is based on a tunable on-chip microring filter. By tuning the center wavelength of the microring filter, the center wavelength of the sensor can be readout by the corresponding tuning power. This approach has the potential of constructing a compact and cost-effective interrogator with good performance.

Proposal of a thermally-tunable silicon-on-insulator microring resonator filter

Ultrasmall Thermally Tunable Microring Resonator With a Submicrometer Heater on Si Nanowires

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Thermally tunable filters based on third-order microring resonators for WDM applications

Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Bandwidth and Wavelength Tunable Optical Passband Filter Based on Silicon Multiple Microring Resonators.

Thermally Tunable High-Order Microring Filters with Large Free-Spectral-range

Optical Micro-Ring Resonators on Silicon for Optical Communications and Optical Sensing

Bandwidth and Wavelength Tunable Optical Filter Based on Silicon Multiple Microring Resonators

Dual-band Optical Filter Based on a Single Microring Resonator Embedded with Nanoholes

Polarization-Insensitive Ultrasmall Microring Resonator Design Based on Optimized Si Sandwich Nanowires

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Thermally-Tuned Silicon Double Ring Resonator for External Cavity Tunable Laser

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Second-Order Microring Filter with Large Free-Spectral-Range and Wavelength-Tunable-Range over 50 Nm

Power-efficient polarization-insensitive tunable microring filter on a multi-layer Si3N4-on-SOI platform

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Versatile Tunning of Compact Microring Waveguide Resonator Based on Lithium Niobate Thin Films

A Tunable Broadband Photonic RF Phase Shifter Based on a Silicon Microring Resonator

Scalable Bandwidth-Tunable Micro-Ring Filter Based on Multi-Channel-Spectrum Combination

Tunable Microring Filter Based On-Chip Interrogator for Wavelength-Modulated Optical Sensor