Ion Incidence Angle Dependent Pattern Formation at AZ 4562® Photo Resist by Ar+ Ion Beam Erosion

Tom Ruediger,Martin Mitzschke,Andrea Prager,Ying Liu,Bernd Abel,Agnes Schulze,Frank Frost
DOI: https://doi.org/10.1016/j.apsusc.2021.151682
IF: 6.7
2022-01-01
Applied Surface Science
Abstract:Interactions between ion beams and polymers have great potential to tailor the properties of the polymer surface by modifying the morphology as well as the chemical composition. The application of a wide range of ion incidence angles (0 degrees - 75 degrees) for the erosion of the commercially available photoresist AZ 4562 (R) revealed a multitude of nanopatterns as investigations using atomic force microscopy and scanning electron microscopy have shown. A sequence of angle-dependent patterns (nanoholes, ripples, facets) can be observed, which are already known from inorganic materials. Additionally, the variation of the erosion time (5 min - 60 min) showed an evolution of the nanopatterns. A changed composition of the polymer surface could be detected by means of X-ray photoelectron spectroscopy.
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