Frequency-Modulated MEMS Gyroscopes: A Review

Xingjing Ren,Xin Zhou,Sheng Yu,Xuezhong Wu,Dingbang Xiao
DOI: https://doi.org/10.1109/jsen.2021.3117939
IF: 4.3
2021-01-01
IEEE Sensors Journal
Abstract:As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based on MEMS craft has attracted more and more attention in recent years, owing to its advantages in low power consumption, low temperature sensitivity, very high bandwidth, and excellent scale factor stability. This review summaries the history and latest development of the FM gyroscope research. The theory of the fr...
What problem does this paper attempt to address?