Abstract:Periodic surface structures are core components for controlling the dispersion and steering characteristics of light. Here, a mask‐free approach using nonablative femtosecond laser processing is proposed and demonstrated to fabricate extremely long‐range uniform periodic surface structures on silicon with tunable diffraction efficiency. First, a cylindrically focused femtosecond laser scans over silicon substrates to efficiently produce large‐area periodic modified stripes in a nonablation regime. Second, the modified stripes act as fine etch stops to generate the desired structures on sample surfaces during the subsequent chemical etching process. The structures produced by the method achieve optimal long‐range uniformity compared to the reported laser‐induced periodic surface structures, which possess a minimum divergence of structure orientation angles of <5°. In addition, the optical characteristics of the prepared structures are measured experimentally. Distinguishable polychromatic diffraction patterns can be clearly observed by broadband light irradiation. Significantly, the chemical etching process endues the structures with ingenious morphology controllability, so that the diffraction efficiency of the incident light can be flexibly tuned, which exhibits a near‐linear function of the etching duration. Such morphology‐controllable periodic surface structures may facilitate applications in broad fields, such as optical communications and optical sensors.

Femtosecond Laser-Induced Spatial-Frequency-shifted Nanostructures by Polarization Ellipticity Modulation.

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Anisotropy Modulations of Femtosecond Laser Pulse Induced Periodic Surface Structures on Silicon by Adjusting Double Pulse Delay.

Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse.

Controllable Formation of Laser-Induced Periodic Surface Structures on ZnO Film by Temporally Shaped Femtosecond Laser Scanning

Continuous Modulations of Femtosecond Laser-Induced Periodic Surface Structures and Scanned Line-Widths on Silicon by Polarization Changes

Effect of Polarization on Femtosecond Laser Pulses Structuring Silicon Surface

Formation of Laser-Induced Periodic Surface Nanometric Concentric Ring Structures on Silicon Surfaces Through Single-Spot Irradiation with Orthogonally Polarized Femtosecond Laser Double-Pulse Sequences

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser

Ultrafast Dynamics of Femtosecond Laser-Induced High Spatial Frequency Periodic Structures on Silicon Surfaces

Polarization-switchable Nanoripples Fabricated on a Silicon Surface by Femtosecond-Laser-assisted Nanopatterning.

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Extremely Regular Periodic Surface Structures in a Large Area Efficiently Induced on Silicon by Temporally Shaped Femtosecond Laser

Nanoscale Material Redistribution Induced by Spatially Modulated Femtosecond Laser Pulses for Flexible High-Efficiency Surface Patterning.

Polarization sensitive microstructures fabricated on lithium niobate surfaces by using femtosecond laser pulses

Femtosecond Laser Induced Tunable Surface Transformations on (111) Si Aided by Square Grids Diffraction

Manipulation of LIPSS Orientation on Silicon Surfaces Using Orthogonally Polarized Femtosecond Laser Double-Pulse Trains.

Femtosecond laser-induced periodic structure adjustments based on electron dynamics control: from subwavelength ripples to double-grating structures.

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application