Abstract:The prospect of employing nanophotonic methods for controlling photon–electron interactions has ignited substantial interest within the particle accelerator community. Silicon-based integrated dielectric laser acceleration (DLA) has emerged as a viable option by leveraging localized photonic effects to emit, accelerate, and measure electron bunches using exclusively light. Here, using highly regular nanopatterning over large areas while preserving the crystalline structure of silicon is imperative to enhance the efficiency and yield of photon-electron effects. While several established fabrication techniques may be used to produce the required silicon nanostructures, alternative techniques are beneficial to enhance scalability, simplicity and cost-efficiency. In this study, we demonstrate the nano-synthesis of silicon structures over arbitrarily large areas utilizing exclusively deep ultraviolet (DUV) ultrafast laser excitation. This approach delivers highly concentrated electromagnetic energy to the material, thus producing nanostructures with features well beyond the diffraction limit. At the core of our demonstration is the production of silicon laser-induced surface structures with an exceptionally high aspect-ratio -reaching a height of more than 100 nm- for a nanostructure periodicity of 250 nm. This result is attained by exploiting a positive feedback effect on the locally enhanced laser electric field as the surface morphology dynamically emerges, in combination with the material properties at DUV wavelengths. We also observe strong nanopattern hybridization yielding intricate 2D structural features as the onset of amorphization takes place at high laser pulse fluence. This technique offers a simple, yet efficient and attractive approach to produce highly uniform and high aspect ratio silicon nanostructures in the 200–300 nm range.

Extremely Regular Periodic Surface Structures in a Large Area Efficiently Induced on Silicon by Temporally Shaped Femtosecond Laser

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Controlling the morphologies of femtosecond laser-induced periodic surface structure on silicon by combining deep learning with energy deposition model

Extremely High-Quality Periodic Structures on ITO Film Efficiently Fabricated by Femtosecond Pulse Train Output from a Frequency-Doubled Fabry–Perot Cavity

Uniformity Control of Laser-Induced Periodic Surface Structures

Femtosecond Laser-Induced Periodic Structures: Mechanisms, Techniques, and Applications

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Optical near fields for ablation of periodic structures

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Large-area fabrication of low- and high-spatial-frequency laser-induced periodic surface structures on carbon fibers

Formation of Array Microstructures on Silicon by Multibeam Interfered Femtosecond Laser Pulses

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Extreme Sub-Wavelength Structure Formation from Mid-IR Femtosecond Laser Interaction with Silicon