Abstract:Modulated nanoindentation, or MoNI, is an atomic‐force‐microscopy‐based nano‐indentation technique for measuring the mechanical properties of 2D materials with angstrom and nN resolution. This technique is demonstrated on the measurement of the transverse Young's modulus and mechanical response of 2D graphene thin films with varying number of atomic layers. As the field of low‐dimensional materials (1D or 2D) grows and more complex and intriguing structures are continuing to be found, there is an emerging need for techniques to characterize the nanoscale mechanical properties of all kinds of 1D/2D materials, in particular in their most practical state: sitting on an underlying substrate. While traditional nanoindentation techniques cannot accurately determine the transverse Young's modulus at the necessary scale without large indentations depths and effects to and from the substrate, herein an atomic‐force‐microscopy‐based modulated nanomechanical measurement technique with Angstrom‐level resolution (MoNI/ÅI) is presented. This technique enables non‐destructive measurements of the out‐of‐plane elasticity of ultra‐thin materials with resolution sufficient to eliminate any contributions from the substrate. This method is used to elucidate the multi‐layer stiffness dependence of graphene deposited via chemical vapor deposition and discover a peak transverse modulus in two‐layer graphene. While MoNI/ÅI has been used toward great findings in the recent past, here all aspects of the implementation of the technique as well as the unique challenges in performing measurements at such small resolutions are encompassed.

In-situ Investigation of the Elastic Behavior of Two-Dimensional MoS2 on Flexible Substrate by Nanoindentation

Natural Overlaying Behaviors Push the Limit of Planar Cyclic Deformation Performance in Few‐layer MoS2 Nanosheets

Delamination of MoS2/SiO2 Interfaces under Nanoindentation.

Delamination of MoS<sub>2</sub>/SiO<sub>2</sub> interfaces under nanoindentation

Local Nanostrain Engineering of Monolayer MoS2 Using Atomic Force Microscopy-Based Thermomechanical Nanoindentation.

In situ characterisation of nanoscale electromechanical properties of quasi-two-dimensional MoS2 and MoO3

Investigation Of The Dynamic Bending Properties Of Mos2 Thin Films By Interference Colours

Probing the Mechanical Properties of 2D Materials via Atomic‐Force‐Microscopy‐Based Modulated Nanoindentation

Mechanical Behaviors of MoS Nanowires under Tension from Molecular Dynamics Simulations

Mapping the elastic properties of two-dimensional MoS2 via bimodal atomic force microscopy and finite element simulation

Improving the Strain Control Performance of MoS2 Monolayer to Develop Flexible Electronics

In Situ Nanomechanical Characterization of Multi-Layer MoS2 Membranes: from Intraplanar to Interplanar Fracture.

Molecular Dynamics Study on the Mechanical Properties of Multilayer MoS2 under Different Potentials

Manipulation of mechanical properties of monolayer molybdenum disulfide: Kirigami and hetero-structure based approach

Kirigami-inspired highly stretchable nanoscale devices using multi-dimensional deformation of monolayer MoS2

Two‐dimensional materials: From mechanical properties to flexible mechanical sensors

Mechanical Properties of 2D Materials Studied by in Situ Microscopy Techniques

Two-dimensional MoS2 Nanomechanical Resonators Freelysuspended on Microtrenches on Flexible Substrate

Thermomechanical Nanostraining of Two-Dimensional Materials

Manipulating Nanopatterns on Two-Dimensional MoS2 Monolayers Via Atomic Force Microscopy-Based Thermomechanical Nanolithography for Optoelectronic Device Fabrication

Nanoscale Adhesion and Material Transfer at 2D MoS 2 -MoS 2 Interfaces Elucidated by In Situ Transmission Electron Microscopy and Atomistic Simulations