Investigation Of The Oligo-Scattering Electron Beam In The Air

G Zhao,M Kotera,H Suga
1998-01-01
Abstract:A new electron beam system is proposed for surface analysis of a specimen which is set in air at atmospheric pressure. The beam spreading phenomenon in the bulkhead film and in the air of the system is analysed by a Monte Carlo simulation of electrons. There is an oligo-scattering beam, which can be used as an effective fine beam to probe the surface structure of the specimen. The characteristics of this specific beam are analysed. By considering the variations of the peak intensity and its ratio to the background level with the distance which the electrons travel, the most preferable condition is obtained.
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