Adaptive Laser Beam Forming for Laser Shock Micro-Forming for 3d Mems Devices Fabrication

Ran Zou,Shuliang Wang,Mohan Wang,Shuo Li,Sheng Huang,Yankun Lin,Kevin P. Chen

DOI: https://doi.org/10.1117/12.2241123

2016-01-01

Abstract:Laser shock micro-forming is a non-thermal laser forming method that use laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. In this paper, we present an adaptive optical technique to engineer spatial profiles of the laser beam to exert precision control on the laser shock forming process for free-standing MEMS structures. Using a spatial light modulator, on-target laser energy profiles are engineered to control shape, size, and deformation magnitude, which has led to significant improvement of the laser shock processing outcome at micrometer scales. The results presented in this paper show that the adaptive-optics laser beam forming is an effective method to improve both quality and throughput of the laser forming process at micrometer scales.