An Improved Design for E-Mode AlGaN/GaN HEMT with Gate Stack -Ga2o3/p-gan Structure

Mei Ge,Yi Li,Youhua Zhu,Dunjun Chen,Zhiliang Wang,Shuxin Tan
DOI: https://doi.org/10.1063/5.0051274
IF: 2.877
2021-01-01
Journal of Applied Physics
Abstract:To improve the performance of the conventional p-GaN gate AlGaN/GaN high electron mobility transistors (HEMTs), we propose an improved design for e-mode AlGaN/GaN HEMT with a gate stack beta-Ga2O3/p-GaN structure. The simulated results show that the proposed device increases the threshold voltage and the gate breakdown voltage in comparison with the conventional p-GaN gate HEMT due to the use of the beta-Ga2O3 layer, which has an additional beta-Ga2O3/p-GaN heterojunction and decreases the strength of electric field in the gate region. Moreover, the proposed device exhibits a lower off-state leakage current, which can be attributed to the less donor ionized density. In addition, the impacts of the beta-Ga2O3 layer thickness are investigated. There is a trade-off between beta-Ga2O3 layer thickness and the performance of the proposed device, including threshold voltage, gate breakdown, and saturation drain current. Published under an exclusive license by AIP Publishing.
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